Reference to Related Application

[0001] This application claims the priority benefit under 35 U. S. C. §119(e) of U.S. Provisional Patent Application No. 61/093,695, filed September 2, 2008.

Background Field of the Invention

[0002J This invention relates generally to light turning devices. More particularly, this invention relates to light turning devices utilizing prismatic structures to guide light to, for example, illuminate a display. This invention also relates to methods of use and fabrication of these devices.

Description of Related Technology

[0003] Microelectromechanical systems (MEMS) include micro mechanical elements, actuators, and electronics. Micromechanical elements may be created using deposition, etching, and/or other micromachining processes that etch away parts of substrates and/or deposited material layers or that add layers to form electrical and electromechanical devices. One type of MEMS device is called an interferometric modulator. As used herein, the term interferometric modulator or interferometric light modulator refers to a device that selectively absorbs and/or reflects light using the principles of optical interference. In certain embodiments, an interferometric modulator may comprise a pair of conductive plates, one or both of which may be transparent and/or reflective in whole or part and capable of relative motion upon application of an appropriate electrical signal. In a particular embodiment, one plate may comprise a stationary layer deposited on a substrate and the other plate may comprise a metallic membrane separated from the stationary layer by an air gap. As described herein in more detail, the position of one plate in relation to another can change the optical interference of light incident on the interferometric modulator. Such devices have a wide range of applications, and it would be beneficial in the art to utilize and/or modify the characteristics of these types of devices so that their features can be exploited in improving existing products and creating new products that have not yet been developed.

Summary [0004] In some embodiments, a light guide apparatus is provided. The apparatus comprises a light guide body formed of a light propagating material that supports the propagation of light through a length of the light guide body. The light guide body is defined by a plurality of exterior surfaces. A first of the exterior surfaces comprises a first plurality of spaced-apart slits configured to redirect light incident on the light guide body, with each slit formed by an undercut in the first exterior surface. A second of the exterior surfaces comprises a second plurality of spaced-apart slits configured to redirect light incident on the light guide body, with each slit formed by an undercut in the second exterior surface.

[0005] In some other embodiments, an illumination apparatus is provided. The apparatus comprises a first means for generating light and directing the light to propagate through a light turning body; a second means for redirecting the light propagating through the light turning body; and a third means for redirecting the light propagating through the light turning body.

[0006] In yet other embodiments, a method for illumination is provided. The method comprises propagating light through a light turning body. Light propagating through the body is redirected by impinging the light on facets of a first and a second plurality of slits. The pluralities of slits are formed by undercuts in two surfaces of the light turning body.

[0007] In some other embodiments, a method for manufacturing an illumination device is provided. The method comprises providing a body of light propagating material that supports the propagation of light through a length of the body. First and second pluralities of spaced-apart undercuts are formed in different sides of the body. In some other embodiments, the illumination device formed by this method is provided. Brief Description of the Drawings

[0008] FIG. 1 is an isometric view depicting a portion of one embodiment of an interferometric modulator display in which a movable reflective layer of a first interferometric modulator is in a relaxed position and a movable reflective layer of a second interferometric modulator is in an actuated position.

[0009] FIG. 2 is a system block diagram illustrating one embodiment of an electronic device incorporating a 3x3 interferometric modulator display.

[0010] FIG. 3 is a diagram of movable mirror position versus applied voltage for one exemplary embodiment of an interferometric modulator of FIG. 1.

[0011] FIG. 4 is an illustration of a set of row and column voltages that may be used to drive an interferometric modulator display.

[0012] FIG. 5A illustrates one exemplary frame of display data in the 3x3 interferometric modulator display of FIG. 2.

[0013] FIG. 5B illustrates one exemplary timing diagram for row and column signals that may be used to write the frame of FIG. 5 A.

[0014] FIGS. 6A and 6B are system block diagrams illustrating an embodiment of a visual display device comprising a plurality of interferometric modulators.

[0015] FIG. 7A is a cross section of the device of FIG. 1.

[0016] FIG. 7B is a cross section of an alternative embodiment of an interferometric modulator.

[0017] FIG. 7C is a cross section of another alternative embodiment of an interferometric modulator.

[0018] FIG. 7D is a cross section of yet another alternative embodiment of an interferometric modulator.

[0019] FIG. 7E is a cross section of an additional alternative embodiment of an interferometric modulator.

[0020] FIG. 8 is a cross section of a display device.

[0021] FIG. 9 is an enlargement of a portion of the cross section of FIG. 8.

[0022] FIG. 1OA is a cross section of an embodiment of a light turning feature. [0023] FIG. 1OB is a cross section of another embodiment of a light turning feature.

[0024] FIG. 1OC is a cross section of yet another embodiment of a light turning feature. [0025] FIG. 1 IA is a top plan view of an embodiment of a display device. [0026] FIG. 1 IB is a cross section of the display device of FIG. 1 IA. [0027] FIGS. 1 IC-I IE are top plan views of embodiments of display devices. [0028] FIGS. 12A-12B are cross sections of embodiments of display devices. [0029] FIGS. 13A-13C are top plan views of embodiments of display devices.

Detailed Description [0030] The following detailed description is directed to certain specific embodiments. However, the teachings herein can be applied in a multitude of different ways. In this description, reference is made to the drawings wherein like or similar parts are designated with like numerals throughout. The embodiments may be implemented in any device that is configured to display an image, whether in motion (e.g., video) or stationary (e.g., still image), and whether textual or pictorial. More particularly, it is contemplated that the embodiments may be implemented in or associated with a variety of electronic devices such as, but not limited to, mobile telephones, wireless devices, personal data assistants (PDAs), hand-held or portable computers, GPS receivers/navigators, cameras, MP3 players, camcorders, game consoles, wrist watches, clocks, calculators, television monitors, flat panel displays, computer monitors, auto displays (e.g., odometer display, etc.), cockpit controls and/or displays, display of camera views (e.g., display of a rear view camera in a vehicle), electronic photographs, electronic billboards or signs, projectors, architectural structures, packaging, and aesthetic structures (e.g., display of images on a piece of jewelry). MEMS devices of similar structure to those described herein can also be used in non-display applications such as in electronic switching devices.

[0031] Some embodiments disclosed herein include a light guide having undercuts in the body of the light guide. The undercuts form prismatic features, also referred to as slits, that turn or redirect light propagating through the light guide body. For example, the walls of the undercuts form facets that reflect light in a desired direction. In some embodiments, a light source is connected to the light guide body. Light from the light source is injected into the light guide body, propagates through the body and contacts the facets of the undercuts. The facets of the slits redirect the light out of the light guide body, e.g., to a display formed of, e.g., interferometric modulators. In some embodiments, first and second pluralities of slits are provided on opposite major surfaces of the light guide body. The slits are configured to redirect the light out of a common major surface.

[0032] In some other embodiments, a plurality of slits is formed in a line light source. For example, the slits are positioned and angled to turn light injected into the line light source from a point light emitter at the end of the line light source. The turned light can, e.g., be expelled out of the line light source along the length of the light source or, in some other embodiments, to an area containing a second plurality of slits. The second plurality of slits can turn the light towards a display.

[0033] One interferometric modulator display embodiment comprising an interferometric MEMS display element is illustrated in Figure 1. In these devices, the pixels are in either a bright or dark state. In the bright ("relaxed" or "open") state, the display element reflects a large portion of incident visible light to a user. When in the dark ("actuated" or "closed") state, the display element reflects little incident visible light to the user. Depending on the embodiment, the light reflectance properties of the "on" and "off states may be reversed. MEMS pixels can be configured to reflect predominantly at selected colors, allowing for a color display in addition to black and white.

[0034] Figure 1 is an isometric view depicting two adjacent pixels in a series of pixels of a visual display, wherein each pixel comprises a MEMS interferometric modulator. In some embodiments, an interferometric modulator display comprises a row/column array of these interferometric modulators. Each interferometric modulator includes a pair of reflective layers positioned at a variable and controllable distance from each other to form a resonant optical gap with at least one variable dimension. In one embodiment, one of the reflective layers may be moved between two positions. In the first position, referred to herein as the relaxed position, the movable reflective layer is positioned at a relatively large distance from a fixed partially reflective layer. In the second position, referred to herein as the actuated position, the movable reflective layer is positioned more closely adjacent to the partially reflective layer. Incident light that reflects from the two layers interferes constructively or destructively depending on the position of the movable reflective layer, producing either an overall reflective or non- reflective state for each pixel.

[0035] The depicted portion of the pixel array in Figure 1 includes two adjacent interferometric modulators 12a and 12b. In the interferometric modulator 12a on the left, a movable reflective layer 14a is illustrated in a relaxed position at a predetermined distance from an optical stack 16a, which includes a partially reflective layer. In the interferometric modulator 12b on the right, the movable reflective layer 14b is illustrated in an actuated position adjacent to the optical stack 16b.

[0036] The optical stacks 16a and 16b (collectively referred to as optical stack 16), as referenced herein, typically comprise several fused layers, which can include an electrode layer, such as indium tin oxide (ITO), a partially reflective layer, such as chromium, and a transparent dielectric. The optical stack 16 is thus electrically conductive, partially transparent and partially reflective, and may be fabricated, for example, by depositing one or more of the above layers onto a transparent substrate 20. The partially reflective layer can be formed from a variety of materials that are partially reflective such as various metals, semiconductors, and dielectrics. The partially reflective layer can be formed of one or more layers of materials, and each of the layers can be formed of a single material or a combination of materials.

[0037] In some embodiments, the layers of the optical stack 16 are patterned into parallel strips, and may form row electrodes in a display device as described further below. The movable reflective layers 14a, 14b may be formed as a series of parallel strips of a deposited metal layer or layers (orthogonal to the row electrodes of 16a, 16b) to form columns deposited on top of posts 18 and an intervening sacrificial material deposited between the posts 18. When the sacrificial material is etched away, the movable reflective layers 14a, 14b are separated from the optical stacks 16a, 16b by a defined gap 19. A highly conductive and reflective material such as aluminum may be used for the reflective layers 14, and these strips may form column electrodes in a display device. Note that Figure 1 may not be to scale. In some embodiments, the spacing between posts 18 may be on the order of 10-100 urn, while the gap 19 may be on the order of < 1000 Angstroms.

[0038] With no applied voltage, the gap 19 remains between the movable reflective layer 14a and optical stack 16a, with the movable reflective layer 14a in a mechanically relaxed state, as illustrated by the pixel 12a in Figure 1. However, when a potential (voltage) difference is applied to a selected row and column, the capacitor formed at the intersection of the row and column electrodes at the corresponding pixel becomes charged, and electrostatic forces pull the electrodes together. If the voltage is high enough, the movable reflective layer 14 is deformed and is forced against the optical stack 16. A dielectric layer (not illustrated in this Figure) within the optical stack 16 may prevent shorting and control the separation distance between layers 14 and 16, as illustrated by actuated pixel 12b on the right in Figure 1. The behavior is the same regardless of the polarity of the applied potential difference.

[0039] Figures 2 through 5 illustrate one exemplary process and system for using an array of interferometric modulators in a display application.

[0040] Figure 2 is a system block diagram illustrating one embodiment of an electronic device that may incorporate interferometric modulators. The electronic device includes a processor 21 which may be any general purpose single- or multi-chip microprocessor such as an ARM ^® , Pentium ^® , 8051, MIPS ^® , Power PC ^® , or ALPHA ^® , or any special purpose microprocessor such as a digital signal processor, microcontroller, or a programmable gate array. As is conventional in the art, the processor 21 may be configured to execute one or more software modules. In addition to executing an operating system, the processor may be configured to execute one or more software applications, including a web browser, a telephone application, an email program, or any other software application.

[0041] In one embodiment, the processor 21 is also configured to communicate with an array driver 22. In one embodiment, the array driver 22 includes a row driver circuit 24 and a column driver circuit 26 that provide signals to a display array or panel 30. The cross section of the array illustrated in Figure 1 is shown by the lines 1- 1 in Figure 2. Note that although FIG. 2 illustrates a 3x3 array of interferometric modulators for the sake of clarity, the display array 30 may contain a very large number of interferometric modulators, and may have a different number of interferometric modulators in rows than in columns (e.g., 300 pixels per row by 190 pixels per column).

[0042] FIG. 3 is a diagram of movable mirror position versus applied voltage for one exemplary embodiment of an interferometric modulator of FIG. 1. For MEMS interferometric modulators, the row/column actuation protocol may take advantage of a hysteresis property of these devices as illustrated in Figure 3. An interferometric modulator may require, for example, a 10 volt potential difference to cause a movable layer to deform from the relaxed state to the actuated state. However, when the voltage is reduced from that value, the movable layer maintains its state as the voltage drops back below 10 volts. In the exemplary embodiment of Figure 3, the movable layer does not relax completely until the voltage drops below 2 volts. There is thus a range of voltage, about 3 to 7 V in the example illustrated in Figure 3, where there exists a window of applied voltage within which the device is stable in either the relaxed or actuated state. This is referred to herein as the "hysteresis window" or "stability window." For a display array having the hysteresis characteristics of Figure 3, the row/column actuation protocol can be designed such that during row strobing, pixels in the strobed row that are to be actuated are exposed to a voltage difference of about 10 volts, and pixels that are to be relaxed are exposed to a voltage difference of close to zero volts. After the strobe, the pixels are exposed to a steady state or bias voltage difference of about 5 volts such that they remain in whatever state the row strobe put them in. After being written, each pixel sees a potential difference within the "stability window" of 3-7 volts in this example. This feature makes the pixel design illustrated in Figure 1 stable under the same applied voltage conditions in either an actuated or relaxed pre-existing state. Since each pixel of the interferometric modulator, whether in the actuated or relaxed state, is essentially a capacitor formed by the fixed and moving reflective layers, this stable state can be held at a voltage within the hysteresis window with almost no power dissipation. Essentially no current flows into the pixel if the applied potential is fixed.

[0043] As described further below, in typical applications, a frame of an image may be created by sending a set of data signals (each having a certain voltage level) across the set of column electrodes in accordance with the desired set of actuated pixels in the first row. A row pulse is then applied to a first row electrode, actuating the pixels corresponding to the set of data signals. The set of data signals is then changed to correspond to the desired set of actuated pixels in a second row. A pulse is then applied to the second row electrode, actuating the appropriate pixels in the second row in accordance with the data signals. The first row of pixels are unaffected by the second row pulse, and remain in the state they were set to during the first row pulse. This may be repeated for the entire series of rows in a sequential fashion to produce the frame. Generally, the frames are refreshed and/or updated with new image data by continually repeating this process at some desired number of frames per second. A wide variety of protocols for driving row and column electrodes of pixel arrays to produce image frames may be used.

[0044] Figures 4 and 5 illustrate one possible actuation protocol for creating a display frame on the 3x3 array of Figure 2. Figure 4 illustrates a possible set of column and row voltage levels that may be used for pixels exhibiting the hysteresis curves of Figure 3. In the Figure 4 embodiment, actuating a pixel involves setting the appropriate column to -V _b , _as , and the appropriate row to +ΔV, which may correspond to -5 volts and +5 volts respectively Relaxing the pixel is accomplished by setting the appropriate column to +V _b , _as , and the appropriate row to the same +ΔV, producing a zero volt potential difference across the pixel. In those rows where the row voltage is held at zero volts, the pixels are stable in whatever state they were originally in, regardless of whether the column is at +V _bias , or -V _bias - As is also illustrated in Figure 4, voltages of opposite polarity than those described above can be used, e.g., actuating a pixel can involve setting the appropriate column to +V _b , _as , and the appropriate row to -ΔV. In this embodiment, releasing the pixel is accomplished by setting the appropriate column to -V _b , _as , and the appropriate row to the same -ΔV, producing a zero volt potential difference across the pixel.

[0045] Figure 5B is a timing diagram showing a series of row and column signals applied to the 3x3 array of Figure 2 which will result in the display arrangement illustrated in Figure 5A, where actuated pixels are non-reflective. Prior to writing the frame illustrated in Figure 5A, the pixels can be in any state, and in this example, all the rows are initially at O volts, and all the columns are at +5 volts. With these applied voltages, all pixels are stable in their existing actuated or relaxed states.

[0046] In the Figure 5 A frame, pixels (1,1), (1 ,2), (2,2), (3,2) and (3,3) are actuated. To accomplish this, during a "line time" for row 1, columns 1 and 2 are set to - 5 volts, and column 3 is set to +5 volts. This does not change the state of any pixels, because all the pixels remain in the 3-7 volt stability window. Row 1 is then strobed with a pulse that goes from 0, up to 5 volts, and back to zero. This actuates the (1,1) and (1,2) pixels and relaxes the (1,3) pixel. No other pixels in the array are affected. To set row 2 as desired, column 2 is set to -5 volts, and columns 1 and 3 are set to +5 volts. The same strobe applied to row 2 will then actuate pixel (2,2) and relax pixels (2,1) and (2,3). Again, no other pixels of the array are affected. Row 3 is similarly set by setting columns 2 and 3 to -5 volts, and column 1 to +5 volts. The row 3 strobe sets the row 3 pixels as shown in Figure 5A. After writing the frame, the row potentials are zero, and the column potentials can remain at either +5 or -5 volts, and the display is then stable in the arrangement of Figure 5 A. The same procedure can be employed for arrays of dozens or hundreds of rows and columns. The timing, sequence, and levels of voltages used to perform row and column actuation can be varied widely within the general principles outlined above, and the above example is exemplary only, and any actuation voltage method can be used with the systems and methods described herein.

[0047] Figures 6A and 6B are system block diagrams illustrating an embodiment of a display device 40. The display device 40 can be, for example, a cellular or mobile telephone. However, the same components of display device 40 or slight variations thereof are also illustrative of various types of display devices such as televisions and portable media players.

[0048] The display device 40 includes a housing 41, a display 30, an antenna 43, a speaker 45, an input device 48, and a microphone 46. The housing 41 is generally formed from any of a variety of manufacturing processes, including injection molding, and vacuum forming. In addition, the housing 41 may be made from any of a variety of materials, including but not limited to plastic, metal, glass, rubber, and ceramic, or a combination thereof. In one embodiment the housing 41 includes removable portions (not shown) that may be interchanged with other removable portions of different color, or containing different logos, pictures, or symbols.

[0049] The display 30 of exemplary display device 40 may be any of a variety of displays, including a bi-stable display, as described herein. In other embodiments, the display 30 includes a flat-panel display, such as plasma, EL, OLED, STN LCD, or TFT LCD as described above, or a non-flat-panel display, such as a CRT or other tube device,. However, for purposes of describing the present embodiment, the display 30 includes an interferometric modulator display, as described herein.

[0050] The components of one embodiment of exemplary display device 40 are schematically illustrated in Figure 6B. The illustrated exemplary display device 40 includes a housing 41 and can include additional components at least partially enclosed therein. For example, in one embodiment, the exemplary display device 40 includes a network interface 27 that includes an antenna 43 which is coupled to a transceiver 47. The transceiver 47 is connected to a processor 21, which is connected to conditioning hardware 52. The conditioning hardware 52 may be configured to condition a signal (e.g. filter a signal). The conditioning hardware 52 is connected to a speaker 45 and a microphone 46. The processor 21 is also connected to an input device 48 and a driver controller 29. The driver controller 29 is coupled to a frame buffer 28, and to an array driver 22, which in turn is coupled to a display array 30. A power supply 50 provides power to all components as required by the particular exemplary display device 40 design.

[0051] The network interface 27 includes the antenna 43 and the transceiver 47 so that the exemplary display device 40 can communicate with one ore more devices over a network. In one embodiment the network interface 27 may also have some processing capabilities to relieve requirements of the processor 21. The antenna 43 is any antenna for transmitting and receiving signals. In one embodiment, the antenna transmits and receives RF signals according to the IEEE 802.1 1 standard, including IEEE 802.1 1 (a), (b), or (g). In another embodiment, the antenna transmits and receives RF signals according to the BLUETOOTH standard. In the case of a cellular telephone, the antenna is designed to receive CDMA, GSM, AMPS, W-CDMA, or other known signals that are used to communicate within a wireless cell phone network. The transceiver 47 pre-processes the signals received from the antenna 43 so that they may be received by and further manipulated by the processor 21. The transceiver 47 also processes signals received from the processor 21 so that they may be transmitted from the exemplary display device 40 via the antenna 43.

[0052] In an alternative embodiment, the transceiver 47 can be replaced by a receiver. In yet another alternative embodiment, network interface 27 can be replaced by an image source, which can store or generate image data to be sent to the processor 21. For example, the image source can be a digital video disc (DVD) or a hard-disc drive that contains image data, or a software module that generates image data.

[0053] Processor 21 generally controls the overall operation of the exemplary display device 40. The processor 21 receives data, such as compressed image data from the network interface 27 or an image source, and processes the data into raw image data or into a format that is readily processed into raw image data. The processor 21 then sends the processed data to the driver controller 29 or to frame buffer 28 for storage. Raw data typically refers to the information that identifies the image characteristics at each location within an image. For example, such image characteristics can include color, saturation, and gray-scale level.

[0054] In one embodiment, the processor 21 includes a microcontroller, CPU, or logic unit to control operation of the exemplary display device 40. Conditioning hardware 52 generally includes amplifiers and filters for transmitting signals to the speaker 45, and for receiving signals from the microphone 46. Conditioning hardware 52 may be discrete components within the exemplary display device 40, or may be incorporated within the processor 21 or other components.

[0055] The driver controller 29 takes the raw image data generated by the processor 21 either directly from the processor 21 or from the frame buffer 28 and reformats the raw image data appropriately for high speed transmission to the array driver 22. Specifically, the driver controller 29 reformats the raw image data into a data flow having a raster-like format, such that it has a time order suitable for scanning across the display array 30. Then the driver controller 29 sends the formatted information to the array driver 22. Although a driver controller 29, such as a LCD controller, is often associated with the system processor 21 as a stand-alone Integrated Circuit (IC), such controllers may be implemented in many ways. They may be embedded in the processor 21 as hardware, embedded in the processor 21 as software, or fully integrated in hardware with the array driver 22.

[0056] Typically, the array driver 22 receives the formatted information from the driver controller 29 and reformats the video data into a parallel set of waveforms that are applied many times per second to the hundreds and sometimes thousands of leads coming from the display's x-y matrix of pixels.

[0057] In one embodiment, the driver controller 29, array driver 22, and display array 30 are appropriate for any of the types of displays described herein. For example, in one embodiment, driver controller 29 is a conventional display controller or a bi-stable display controller (e.g., an interferometric modulator controller). In another embodiment, array driver 22 is a conventional driver or a bi-stable display driver (e.g., an interferometric modulator display). In one embodiment, a driver controller 29 is integrated with the array driver 22. Such an embodiment is common in highly integrated systems such as cellular phones, watches, and other small area displays. In yet another embodiment, display array 30 is a typical display array or a bi-stable display array (e.g., a display including an array of interferometric modulators).

[0058] The input device 48 allows a user to control the operation of the exemplary display device 40. In one embodiment, input device 48 includes a keypad, such as a QWERTY keyboard or a telephone keypad, a button, a switch, a touch-sensitive screen, a pressure- or heat-sensitive membrane. In one embodiment, the microphone 46 is an input device for the exemplary display device 40. When the microphone 46 is used to input data to the device, voice commands may be provided by a user for controlling operations of the exemplary display device 40.

[0059] Power supply 50 can include a variety of energy storage devices as are well known in the art. For example, in one embodiment, power supply 50 is a rechargeable battery, such as a nickel-cadmium battery or a lithium ion battery. In another embodiment, power supply 50 is a renewable energy source, a capacitor, or a solar cell, including a plastic solar cell, and solar-cell paint. In another embodiment, power supply 50 is configured to receive power from a wall outlet. [0060] In some implementations control programmability resides, as described above, in a driver controller which can be located in several places in the electronic display system. In some cases control programmability resides in the array driver 22. The above-described optimization may be implemented in any number of hardware and/or software components and in various configurations.

[0061] The details of the structure of interferometric modulators that operate in accordance with the principles set forth above may vary widely. For example, Figures 7A-7E illustrate five different embodiments of the movable reflective layer 14 and its supporting structures. Figure 7 A is a cross section of the embodiment of Figure 1, where a strip of metal material 14 is deposited on orthogonally extending supports 18. In Figure 7B, the moveable reflective layer 14 of each interferometric modulator is square or rectangular in shape and attached to supports at the corners only, on tethers 32. In Figure 7C, the moveable reflective layer 14 is square or rectangular in shape and suspended from a deformable layer 34, which may comprise a flexible metal. The deformable layer 34 connects, directly or indirectly, to the substrate 20 around the perimeter of the deformable layer 34. These connections are herein referred to as support posts. The embodiment illustrated in Figure 7D has support post plugs 42 upon which the deformable layer 34 rests. The movable reflective layer 14 remains suspended over the gap, as in Figures 7A-7C, but the deformable layer 34 does not form the support posts by filling holes between the deformable layer 34 and the optical stack 16. Rather, the support posts are formed of a planarization material, which is used to form support post plugs 42. The embodiment illustrated in Figure 7E is based on the embodiment shown in Figure 7D, but may also be adapted to work with any of the embodiments illustrated in Figures 7A-7C as well as additional embodiments not shown. In the embodiment shown in Figure 7E, an extra layer of metal or other conductive material has been used to form a bus structure 44. This allows signal routing along the back of the interferometric modulators, eliminating a number of electrodes that may otherwise have had to be formed on the substrate 20.

[0062] In embodiments such as those shown in Figure 7, the interferometric modulators function as direct-view devices, in which images are viewed from the front side of the transparent substrate 20, the side opposite to that upon which the modulator is arranged. In these embodiments, the reflective layer 14 optically shields the portions of the interferometric modulator on the side of the reflective layer opposite the substrate 20, including the deformable layer 34. This allows the shielded areas to be configured and operated upon without negatively affecting the image quality. For example, such shielding allows the bus structure 44 in Figure 7E, which provides the ability to separate the optical properties of the modulator from the electromechanical properties of the modulator, such as addressing and the movements that result from that addressing. This separable modulator architecture allows the structural design and materials used for the electromechanical aspects and the optical aspects of the modulator to be selected and to function independently of each other. Moreover, the embodiments shown in Figures 7C- 7E have additional benefits deriving from the decoupling of the optical properties of the reflective layer 14 from its mechanical properties, which are carried out by the deformable layer 34. This allows the structural design and materials used for the reflective layer 14 to be optimized with respect to the optical properties, and the structural design and materials used for the deformable layer 34 to be optimized with respect to desired mechanical properties.

[0063] Light incident on an interferometric modulator is either reflected or absorbed due to constructive or destructive interference, depending on the distance between the optical stack 16 and the reflective layer 14. The perceived brightness and quality of a display using interferometric modulators is dependent on the light incident on the display, since that light is reflected to produce an image in the display. In some circumstances, such as in low ambient light conditions, an illumination system may be used to illuminate the display to produce an image.

[0064] Figure 8 is a cross section of a display device including an illumination system that includes a light guide panel 80 disposed adjacent a display 81. The light guide panel 80 includes a light turning film 89 having light turning features 82. A light source 92 injects light into the panel 80. The light turning features 82 direct the light propagating through the light guide panel 80 onto the display 81.

[0065] With reference to Figure 9, it has been found that the light turning features 82 are susceptible to light loss, which can reduce the amount of light redirected to the display 81. The features 82 are formed by facets 82a and 82b, which form angles θi and θ ₂ of greater than 90° with surfaces 83a, 83b, respectively. Typically, light incident the facet 82a is reflected either towards a display 81 or may continue to propagate inside the light guide panel 80 by total internal reflection. However, light incident the facet 82a at close to the angle of the normal to that surface is not reflected and can propagate out of the light guide panel 80, thereby causing light loss. In display light applications, this light loss can result in reduced display brightness and/or uniformity.

[0066] With reference to Figure 1OA, some embodiments of the invention provide slits 100 for redirecting light propagating through a light guide body 180, which can be a panel of optically transmissive material. Advantageously, the slits 100 reduce light loss by recycling light that propagates out of the panel 180. For example, the ray 103 propagates out of the panel 180, but is then re-injected into the panel 180, where it continues to propagate until redirected as desired out of the panel 180 by contact with a facet 104.

[0067] It will be appreciated that the slits 100 are undercuts in the light guide body 180 and are defined by facets 104 and 106. The volume defined by the "undercut" extends at least partly directly over the surface 108 of the light guide body 180, when the surface 108 is positioned facing downwards. In some embodiments, the facet 106 and the surface 108 are contiguous through and define an angle 1 10, which is less than 90°. It will be appreciated that, while devoid of the material forming the light guide body 180, the slits 100 can be filled with another material that facilitates total internal reflection in the body 180. In other embodiments, the slits 100 can have an open volume and be completely devoid of solid material.

[0068] The facets 104 are angled to redirect or reflect, in a desired direction, light propagating through the panel 180. In some embodiments, light is injected into the light guide body by the light source 192, impinges on the facet 104 and is redirected towards the display 81.

[0069] With reference to Figure 1OB, the slits 100 are lined with an anti- reflective coating 1 12 in some embodiments. The anti-reflective coating 1 12 has advantages for reducing undesired light reflections. For example, for light exiting the facet 104, the coating 1 12 can minimize the reflection of light off of the facet 106, thereby facilitating the re-injection of light into the panel 180. Examples of anti- reflective coatings include, without limitation, silicon oxide (SiO ₂ ), silicon nitride (SiN ₄ ) and aluminum oxide (Al ₂ O ₃ ) coatings.

[0070] In some embodiments, the slits 100 form a volume that is open to the surface 108. In some other embodiments, with reference to Figure 1OC, the slits 100 can be disposed completely within the light guide body 180. For example, the slits 100 can be formed under the surface 108 and a narrow connecting part 1 14 at an end of each slit 100 can be sealed, e.g., by the natural resiliency of the material forming the panel 180, or by application of a sealant or adhesive on those parts. The sealing of the parts 1 14 can reduce contamination of or damage to the slits 100 by protecting against external objects that may contact with the surfaces or edges of facets 104 and 106 of the slits 100. In some other embodiments, the narrow parts 114 are not sealed, but the opening defined by that part is relatively narrow compared to the illustrated transverse cross-sectional area of the slits 100, thereby also providing protection for the slits 100.

[0071] It will be appreciated that the illustrated slits 100 are not necessarily drawn to scale and their relative sizes can differ. Moreover, the relative angles of the facets 104 and 106 can differ from that illustrated. For example, the cross-sectional areas of the slits 100 can vary and the relative orientations and angles defined by the facets 104, 106 can vary from slit to slit.

[0072] With reference to Figures 10A- 1OC, in some embodiments, the facets

104 and 106 can be substantially parallel opposite one another, and can be joined by a single slit sidewall 105 that is parallel to the surface 108. The slit 100 can thus define a volume having the shape of a parallelogram. The parallel orientation of the slit sidewall

105 advantageously facilitates total internal reflection of light within the body 102, since the parallel sidewall 105 reflects light at similar angles to the surface 108.

[0073] The slits 100 can be utilized in various devices in which light turning, or redirection, is desired. In some embodiments, the slits 100 are utilized as light turning features in illumination devices. Such illumination devices can include wide area lights for indoor or outdoor use. For example, illumination devices can provide overhead lighting for rooms and other indoor spaces. [0074] Figure 1 IA is a top plan view of a display device having a light guide body 180 and an illumination system including a light bar 190 utilizing the slits 100 as light turning features. Figure 1 IB is a cross section of the display device. The light bar 190 and light guide body 180 are formed of substantially optically transmissive material that can support the propagation of light through the lengths of those structures. For example, the light bar 190 and light guide body 180 can be formed of glass, plastic or other highly transparent materials.

[0075] With reference to both Figures 1 IA and 1 IB, the light guide body 180 is disposed adjacent and faces a display 181. The slits 100 are configured to turn light from the light bar 190 towards the display 181. In some embodiments, the illumination system acts as a front light. Light reflected from the display 181 is transmitted back through and out of the light guide body 180 towards the viewer. The display 181 can include various display elements, e.g., a plurality of spatial light modulators, interferometric modulators, liquid crystal elements, electrophoretic, etc., which can be arranged parallel the major surface of the panel 180. The display 181 is the display 30 (Figures 6A and 6B) in some embodiments.

[0076] With continued reference to Figure HA, the light bar 190 has a first end 190a for receiving light from a light emitter 192. The light bar 190 and the light emitter 192 together form a line light source. The light emitter 192 may include a light emitting diode (LED), although other light emitting devices are also possible. Light emitted from the light emitter 192 propagates into the light bar 190. The light is guided therein, for example, via total internal reflection at sidewalls thereof, which form interfaces with air or some other surrounding fluid or solid medium. For example, where the light bar 190 is formed of a material with a similar refractive index as the light guide body 180, the light bar 190 can be separated from the light guide body 180 by air, fluid or solid medium to promote total internal reflection within the light bar 190.

[0077] The light bar 190 includes slits 100 on at least one side, for example, the side 190b that is substantially opposite the light guide body 180. The slits 100 are configured to turn light incident on that side 190b of the light bar 190 and to direct that light out of the light bar 190 (e.g., out side 190c) into the light guide body 180. It will be appreciated that the slits 100 shown in Figure 1 1 A are schematic. The sizes, shapes, densities, position, etc. of the slits 100 can vary from that depicted to achieve the desired light turning effect. For example, in some embodiments, the slits 100 extend further into the body of the light bar 190 with increasing distance from the side 190a.

[0078] In certain embodiments, the illumination apparatus further includes a coupling optic (not shown) between the light bar 190 and the light guide body 180. For example, the coupling optic may collimate, magnify, diffuse, change the color, etc., of light propagating from the light bar 190.

[0079] Accordingly, light travels from the first end 190a in the direction of a second end 19Od of the light bar 190, and can be reflected back again towards the first end 190a. Along the way, the light impinging on the slits 100 is turned towards the adjacent light guide body 180. The light guide body 180 is disposed with respect to the light bar 190 so as to receive light that has been turned by the slits. The light guide body 180, in turn, redirects light out of the light guide body 180 and towards the display 181.

[0080] While shown for ease of discussion and illustration on one side of the light bar 190 (Figure 1 IA), in some embodiments, the slits 100 are formed along multiple surfaces of the light bar 190. With reference to Figure HC, the slits 100 are formed along the sides 190b and 190c of the light bar 190. Forming slits 100 on multiple sides can have advantages for more efficiently turning light, per unit length of the light bar 190. In addition, the spacing between slits 100 on each side 190b, 190c can be increased for a given density of the slits 100 per unit length of the light bar 190, which can have advantages for facilitating the manufacturing of dense slit patterns. It will be appreciated that the slits in the surfaces 108 and 109 can differ in one or more of total number, transverse cross-sectional shape, dimensions, and angles formed between the slits and the major surfaces.

[0081] With reference to Figure 1 ID, a light bar such as the light bar 190 can be integrated into a light guide body, thereby forming a single light guide body/light bar structure 182. The integrated light guide body/light bar structure 182 has advantages for manufacturing and for reducing the number of components in a display device. It will be appreciated that the light turning features can take various forms, including prismatic features such as the slits 100 (as discussed further herein), holographic features, or various other light turning features known in the art. [0082] It will be appreciated that the light guide body 182 or 180 (Figures lOA-1 1C) is defined by first and second opposite edges. As illustrated, the slits 100 may be formed in one of these edges and redirect light in a direction towards the opposite edge. Third and fourth edges further define the light guide body 182, with light entering into the light guide body by impinging, e.g., the third edge (the lower edge in Figure 1 1 E). The light guide body 182 also contains upper and lower major sides or surfaces (stretching from the first to the second edge and from the third to the fourth edge).

[0083] Light is injected into the light guide body 182 from the light emitter 192. The light can be collimated and is redirected by the slits 100 towards the display area 183, where light turning features redirect the light towards a display (not shown).

[0084] With continued reference to Figure HD, slits 100 closer to the light emitter 192 can block light from reaching the surfaces of other slits 100 farther from the light emitter 192. With increasing distance from the light emitter 192 along the Y-axis, the slits 100 extend further along the X-axis, to allow contact with light from the light emitter 192. In some embodiments, the slits 100 farthest from the light emitter 192 can span substantially the entire length of the emitter 192 along the X-axis.

[0085] It will be appreciated that the pitch or density of the slits 100 along the Y-axis, the length of the slits 100 along the X-axis and the angles of the slits can be uniform or can vary to achieve a desired light turning effect. For example, in some embodiments, the exposed surface area of the slits 100 for contacting and turning light are substantially equal per unit length along the Y-axis, thereby facilitating a uniform flux of turned light per unit length along the Y-axis.

[0086] To further increase the efficiency of the light extraction (i.e., to increase the proportion of the emitted light that is turned towards the display area 183), light from the light emitter 192 is angled towards an edge 184 of the illustrated light guide body 182, along which the slits 100 are formed. The light can be angled by, e.g., attaching the light emitter 192 to the light guide body 182 at an angle, or by use of an appropriate optical component or film to direct the light in the desired direction. Advantageously, the light that is not turned can be recycled, thereby increasing the efficiency of the light extraction relative to arrangements in which the light is not directed along the edge in which the slits 100 are formed. [0087] With reference to Figure 1 IE, as noted above, in some embodiments, additional slits 100 are provided in an area 182 corresponding to a display. Light is emitted from the light emitter 192, the light is then turned by the slits 100 on the edge 184, and the turned light is turned towards a display (not shown) by the slits 100 in the display area 182.

[0088] In some other embodiments, the slits 100 can be provided in a light guide body without slits 100 that form the light turning features of a light bar. Figure 12A shows a cross section of a display device including a light guide body 180 having slits 100. The light bar 190 injects light into a first end 180a of the light guide body 180. The light travels from the first end 180a in the direction of a second end 180d of the light guide body 180, and can be reflected back again towards the first end 180a by total internal reflection. As it propagates through the light guide body 180, some of the light impinges on the slits 100 and is turned towards the display 181.

[0089] With continued reference to Figure 12A, the slits 100 are formed along the major side or surface 180b, which faces the display 181. In some other embodiments, with reference to Figure 12B, the slits 100 can be disposed along both major surfaces of the light guide body 180, e.g., along both major sides 180b and 180c. As noted above, forming slits 100 along multiple surfaces can have advantages for efficiently turning light and for ease of manufacture, where a high density of slits is desired for a unit length of the light guide body 180. While shown separated from the end 180a in the Figures 12A and 12B for ease of illustration, it will be appreciated that the light bar 190 can form an integrated structure with the light guide body 180, or can be separated. For example, the light bar 190 of Figures 12A and 12B can form a unitary light guide body, with slits in the light bar 190 and a major surface of the light guide body.

[0090] The slits 100 can be distributed in the light bar 190, the light turning light guide body 180 and the integrated light guide body/light bar structure 182 in various patterns to achieved desired light turning properties. It will be appreciated that uniformity of power per area is desired in many applications to uniformly light the display 181 (Figures 1 IB, 12A and 12B). The slits 100 may be arranged to achieve good uniformity in power per area. [0091] With reference to Figures 13A, 13B and 13C, the density of the slits 100 increases with increasing distance from the light bar 190 (Figure 13A), the point light emitter 192 (Figure 13B) or the edge 184 (Figure 13C). With reference to Figure 13 A, the number of slits 100 per unit area (in one or both of the top and bottom major sides of the light guide body 180) increases with increasing distance from the edge of the light guide body 180 directly adjacent the light bar 190. The slits 100 extend in substantially straight lights parallel to the light bar 190.

[0092] With reference to Figure 13B, the number of slits 100 per unit area (in one or both of the top and bottom major sides of the light guide body 180) increases with distance from the point light source 192. The slits 100 for semicircular segments centered on the point light source 192.

[0093] With reference to Figure 13C, the number of slits 100 per unit area (in one or both of the top and bottom major sides of the light guide body 180) increases with distance from the edge 184. The additional slits 100 along that edge turn light and allow that side of the light guide body 182 to function as a line light source.

[0094] In some embodiments, the varying density of the slits 100 allows the flux of light redirected per unit area to be highly uniform over the area of the light turning light guide body 180, 182 corresponding to the display 181. As light propagates through the light turning light guide body 180, 182, some amount of light contacts the slits 100 and is redirected out of the light guide body 180, 182. Thus, the remaining light propagating through the light guide body 180, 182 decreases with distance from the light source, as more and more light is redirected by contact with the slits 100. To compensate for the decreasing amounts of light propagating through the light guide body 180, 182, the density of the slits 100 increases with distance from a light point source or line light source.

[0095] It will be appreciated that the density of the slits refers to the area occupied by the slits 100 per unit area of a body of material in which the slits are formed. A single large slit 100 or a plurality of smaller slits 100 in a given area may have the same density. Thus, the density may be changed due to, e.g., changes in the sizes and/or numbers of the slits 100 per area. [0096] The slits 100 can be formed by various methods. In some embodiments, the slits 100 are formed as a body of light propagating material, such as a light guide body or light bar, is formed. For example, the body of light propagating material can be formed by extrusion through a die having an opening corresponding to a cross-sectional shape of a light guide body or light bar and also having projections in the die corresponding to the slits 100. The material forming the body is pushed and/or drawn through the die in the direction in which the slits 100 extend, thereby forming a length of material having the desired cross-sectional shape and having the slits 100. The length of material is then cut into the desired dimensions for a light guide body or light bar.

[0097] In another example, the body of light propagating material can be formed by casting, in which material is placed in a mold and allowed to harden. The mold contains extensions corresponding to the slits. Once hardened, the body of light propagating material is removed from the mold. The mold can correspond to a single light guide body or light bar, such that the removed body of light propagating material can be used as a single light turning light guide body or light bar. In other embodiments, the mold produces a large sheet of material, which is cut into desired dimensions for one or more light turning light guide bodys and/or light bars.

[0098] In yet another example, the body of light propagating material is formed by injection molding, in which a fluid material is injected into a mold and then ejected from the mold after hardening. Where the mold corresponds to a single light guide body or light bar, the removed body of light propagating material can be used as a single light turning light guide body or light bar. The mold may also produce a large sheet of material, and the sheet is cut into desired dimensions for one or more light turning light guide bodys and/or light bars.

[0099] In some other embodiments, the slits 100 are formed after formation of a light turning body. For example, the slits 100 can be formed by embossing, in which a die, having protrusions corresponding to the slits 100, is pressed against a body of light propagating material to form the slits 100 in the body. The body can be heated, making the body sufficiently malleable to take the shape of the slits 100.

[0100] In another example, material is removed from the body of light propagating material to form the slits 100. For example, the slits 100 can be formed by machining or cutting into the body. In other embodiments, material is removed from the body by laser ablation.

[0101] It will be appreciated that the methods disclosed herein can be utilized to form light bars and/or light guide bodys. In some embodiments, the light bars can be formed after formation of the light guide body. For example, after forming a sheet of material having slits (e.g., by extrusion, casting, injection molding, or removal of material from a body of light propagating material), the sheet of material can be cut or stamped into a desired shape. In this cutting or stamping process, slits 100 can be formed at an edge of a light guide body.

[0102] In some other embodiments, a light guide body is formed in sections that are later combined. The sections can be formed using the methods disclosed herein. The sections are glued or otherwise attached together with a refractive index matching material to form a single light guide body. Section by section formation of a light guide body allows the formation of curved slits 100 that may otherwise be difficult for a particular method to form as a single continuous structure.

[0103] In some embodiments, the light guide body is attached to a display after being formed. The light guide body is also attached to a light source to form a display device having an illumination system.

[0104] It will be understood by those skilled in the art that, although this invention has been disclosed in the context of certain preferred embodiments and examples, the present invention extends beyond the specifically disclosed embodiments to other alternative embodiments and/or uses of the invention and obvious modifications and equivalents thereof. In addition, while several variations of the invention have been shown and described in detail, other modifications, which are within the scope of this invention, will be readily apparent to those of skill in the art based upon this disclosure. It is also contemplated that various combinations or sub-combinations of the specific features and aspects of the embodiments may be made and still fall within the scope of the invention. It should be understood that various features and aspects of the disclosed embodiments can be combined with, or substituted for, one another in order to form varying modes of the disclosed invention. Thus, it is intended that the scope of the present invention herein disclosed should not be limited by the particular disclosed embodiments described above, but should be determined only by the claims that follow.