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Patent Searching and Data


Title:
LIGHTING DEVICE FOR EXPOSURE, EXPOSURE APPARATUS AND EXPOSURE METHOD
Document Type and Number:
WIPO Patent Application WO/2016/190381
Kind Code:
A1
Abstract:
A lighting device for exposure is provided with: a lamp unit (60); a fly eye lens (65) that has a plurality of lens elements (65a) arranged in a matrix with p rows and q columns; a plane mirror (68) that is provided with a mirror transformation unit (70) for changing the shape of a reflection surface; and an optical filter (90) that has a plurality of cells (91) arranged in a matrix with p-2 to p+2 rows and q-2 to q+2 columns and each having the same light transmittance distribution, and is disposed between the lamp unit (60) and the fly eye lens (65) and movable in a direction orthogonal to an optical path (EL).

Inventors:
KAWASHIMA HIRONORI (JP)
Application Number:
PCT/JP2016/065545
Publication Date:
December 01, 2016
Filing Date:
May 26, 2016
Export Citation:
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Assignee:
V TECH CO LTD (JP)
International Classes:
G03F7/20; G02B3/00; G02B19/00
Foreign References:
JPH10319321A1998-12-04
JP2012155086A2012-08-16
JP2001135564A2001-05-18
JP2006210553A2006-08-10
Attorney, Agent or Firm:
EIKOH PATENT FIRM, P. C. (JP)
Patent business corporation glory patent firm (JP)
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