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Title:
LIGHTING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/010560
Kind Code:
A1
Abstract:
A lighting region is formed, said lighting region having an optical intensity distribution shaped like a trapezoid going in a prescribed direction, and having at each point a pupil intensity distribution that has a required shape. A disclosed lighting optical system, which illuminates a target surface with light from a light source, is provided with: an illumination-field-forming optical system that forms a first illumination field and a second illumination field on a prescribed surface that is optically conjugate to the target surface; a light-guide optical system that guides a first light beam from the first illumination field and a second light beam from the second illumination field to the target surface and causes the first light beam and the second light beam to overlap in the lighting region on the target surface; a first aperture member that is disposed at a position separated from the prescribed surface by just a first distance towards the light source and which blocks part of the first light beam, which forms the first illumination field; and a second aperture member that is disposed at a position separated from the prescribed surface by just a second distance towards the target surface and which blocks part of the second light beam, which forms the second illumination field.

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Inventors:
KOMATSUDA Hideki (12-1 Yurakucho 1-chome, Chiyoda-k, Tokyo 31, 〒1008331, JP)
Application Number:
JP2010/061593
Publication Date:
January 27, 2011
Filing Date:
July 08, 2010
Export Citation:
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Assignee:
NIKON CORPORATION (12-1, Yurakucho 1-chome Chiyoda-k, Tokyo 31, 〒1008331, JP)
株式会社ニコン (〒31 東京都千代田区有楽町一丁目12番1号 Tokyo, 〒1008331, JP)
International Classes:
H01L21/027; G02B5/00; G02B19/00; G03F7/20
Attorney, Agent or Firm:
YAMAGUCHI Takao (Daiichi Bldg, 10 Kanda-tsukasacho 2-chom, Chiyoda-ku Tokyo 48, 〒1010048, JP)
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