Title:
LIGHTING SYSTEM, ESPECIALLY FOR EXTREME ULTRAVIOLET LITHOGRAPHY
Document Type and Number:
WIPO Patent Application WO1999057732
Kind Code:
A9
Abstract:
The invention relates to a lighting system for wavelengths
Inventors:
SCHULTZ JOERG (DE)
WANGLER JOHANNES (DE)
WANGLER JOHANNES (DE)
Application Number:
PCT/EP1999/002999
Publication Date:
February 24, 2000
Filing Date:
May 04, 1999
Export Citation:
Assignee:
ZEISS CARL (DE)
ZEISS STIFTUNG (DE)
SCHULTZ JOERG (DE)
WANGLER JOHANNES (DE)
ZEISS STIFTUNG (DE)
SCHULTZ JOERG (DE)
WANGLER JOHANNES (DE)
International Classes:
F21V5/00; F21V7/00; F21V13/04; G03F7/20; G21K1/06; G21K5/00; G21K5/02; H01L21/027; (IPC1-7): G21K1/06
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