LINEAR DRIVE MECHANISM AND SHAPE MEASURING MACHINE

Title:

LINEAR DRIVE MECHANISM AND SHAPE MEASURING MACHINE

Document Type and Number:

WIPO Patent Application WO/2019/150681

Kind Code:

A1

Abstract:

Provided are: a linear drive mechanism in which a reduction in the measuring accuracy of a detector can be prevented; and a shape measuring machine provided with the linear drive mechanism. This liner drive mechanism is configured so that a contact or non-contact detector having sensitivity in a first axial direction is moved relative to a workpiece in a second axial direction perpendicular to the first axial direction. The liner drive mechanism is provided with: a drive shaft which extends in the second axial direction; a mover which is supported by the drive shaft without contact and which moves along the drive shaft together with the detector or the workpiece; a guide which is provided at a position offset relative to the drive shaft in a third axial direction perpendicular to both the first axial direction and the second axial direction, and which is parallel to the drive shaft; and a resistance force generation section which is provided on either the mover or the guide, is in contact with the other of the mover and the guide, and generates resistance force acting against the movement of the mover.

Inventors:

OKANO TAKAHIRO (JP)

Application Number:

PCT/JP2018/040880

Publication Date:

August 08, 2019

Filing Date:

November 02, 2018

Export Citation:

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Assignee:

TOKYO SEIMITSU CO LTD (JP)

International Classes:

G01B21/00; B23Q5/28; G01B5/00; H02K41/02; H02P7/02

Domestic Patent References:

WO2013065180A1

2013-05-10

Foreign References:

JP2012078344A	2012-04-19
JPH09163715A	1997-06-20
JP2000092813A	2000-03-31
JP2015225011A	2015-12-14
JPH10154012A	1998-06-09
JPH1198886A	1999-04-09
JPH0198886A	1989-04-17
JP2016017780A	2016-02-01

Other References: