Title:
LINEAR EFFUSION CELL, METHOD OF MANUFACTURING THE SAME AND EVAPORATOR USING THE SAME
Document Type and Number:
WIPO Patent Application WO/2011/155661
Kind Code:
A1
Abstract:
Disclosed herein is a linear effusion cell, which is used in a vacuum deposition system, including: a crucible made of pyrolytic boron nitride (PBN), having an open upper portion and containing a raw material; a first heat generating unit formed on an outer surface of the crucible and having a pattern suitable for heating; an array of orifices formed through the lateral sides of the crucible and the first heat generating unit.
Inventors:
WOO DEOK HA (KR)
KIM SUN HO (KR)
LEE SEOK (KR)
BYUN YOUNG TAE (KR)
JHON YOUNG MIN (KR)
KIM JAE HUN (KR)
PARK MIN CHUL (KR)
KIM SHIN GEUN (KR)
JUNG YONG WOO (KR)
KIM SUN HO (KR)
LEE SEOK (KR)
BYUN YOUNG TAE (KR)
JHON YOUNG MIN (KR)
KIM JAE HUN (KR)
PARK MIN CHUL (KR)
KIM SHIN GEUN (KR)
JUNG YONG WOO (KR)
Application Number:
PCT/KR2010/005031
Publication Date:
December 15, 2011
Filing Date:
July 30, 2010
Export Citation:
Assignee:
KOREA INST SCI & TECH (KR)
WOO DEOK HA (KR)
KIM SUN HO (KR)
LEE SEOK (KR)
BYUN YOUNG TAE (KR)
JHON YOUNG MIN (KR)
KIM JAE HUN (KR)
PARK MIN CHUL (KR)
KIM SHIN GEUN (KR)
JUNG YONG WOO (KR)
WOO DEOK HA (KR)
KIM SUN HO (KR)
LEE SEOK (KR)
BYUN YOUNG TAE (KR)
JHON YOUNG MIN (KR)
KIM JAE HUN (KR)
PARK MIN CHUL (KR)
KIM SHIN GEUN (KR)
JUNG YONG WOO (KR)
International Classes:
C23C14/24; C23C14/04
Foreign References:
| KR20060084042A | 2006-07-21 | |||
| JPH0585888A | 1993-04-06 | |||
| KR20040047585A | 2004-06-05 | |||
| KR20070014960A | 2007-02-01 |
Attorney, Agent or Firm:
LEE, Jong-ll (Byucksan Digitalvalley Vii 901170-13, Guro-dong, Guro-gu, Seoul 152-742, KR)
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Claims: