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Title:
LINEAR EVAPORATION DEPOSITION APPARATUS USING INDUCTION HEATING
Document Type and Number:
WIPO Patent Application WO/2016/167479
Kind Code:
A1
Abstract:
The present invention provides a linear evaporation deposition apparatus. The linear evaporation deposition apparatus comprises: a vacuum container extending in a first direction; an evaporation crucible disposed within the vacuum container and formed of a conductive material and extending in the first direction, wherein the evaporation crucible includes a receiving space for receiving a material to be deposited, generates vapor by heating the material to be deposited, and sprays the vapor through a plurality of nozzles connected to the receiving space; an induction heating coil disposed within the vacuum container and extending in the first direction, wherein the induction heating coil generates an induced electric field and heats the evaporation crucible through induction heating; and an evaporation crucible support part that secures the evaporation crucible to the vacuum container.

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Inventors:
LEE JOO-IN (KR)
SHIN YONG-HYEON (KR)
Application Number:
PCT/KR2016/002630
Publication Date:
October 20, 2016
Filing Date:
March 17, 2016
Export Citation:
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Assignee:
KOREA RES INST STANDARDS & SCI (KR)
International Classes:
H01L51/00; H01L21/203; H01L51/56
Foreign References:
KR20140136671A2014-12-01
KR20110024223A2011-03-09
KR20140038844A2014-03-31
KR20060088984A2006-08-08
KR20070113410A2007-11-29
Attorney, Agent or Firm:
NURY PATENT LAW FIRM (KR)
특허법인 누리 (KR)
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