LINEAR MOTION DEVICE

Title:

LINEAR MOTION DEVICE

Document Type and Number:

WIPO Patent Application WO/2014/020649

Kind Code:

A1

Abstract:

Provided is a linear motion device, which is capable of keeping the amount of microparticles generated between the rolling element track and the rolling elements escaping from the device as low as possible and which is ideal for clean environments such as semiconductor manufacturing equipment or liquid crystal display panel manufacturing equipment. In the linear motion device (1), each of a pair of sealing members (7) is formed in a shape that, when installed on the moving member (3) and sectioned along a direction orthogonal to the axial direction of the track member (2), has a gap (δ) in the range of 0.025-0.15 mm with respect to the track member (2). Grease with a mixing consistency of 175 to 250 is applied between the rolling element track (5) and the rolling elements (4).

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Inventors:

YAMAMOTO KAZUHITO (JP)
OOKUBO TSUTOMU (JP)

Application Number:

PCT/JP2012/004898

Publication Date:

February 06, 2014

Filing Date:

August 01, 2012

Export Citation:

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Assignee:

NSK LTD (JP)
YAMAMOTO KAZUHITO (JP)
OOKUBO TSUTOMU (JP)

International Classes:

F16H25/24; F16C29/06; F16C33/76; F16H25/22

Domestic Patent References:

WO2006054439A1

2006-05-26

Foreign References:

JP2011247404A	2011-12-08
JP2006112517A	2006-04-27
JP2003343686A	2003-12-03
JP2011190928A	2011-09-29
JP2010169114A	2010-08-05

Other References: