Title:
LINEAR PHOTOELECTRIC FOCAL PLANE DETECTOR AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2024/055463
Kind Code:
A1
Abstract:
A linear photoelectric focal plane detector and a manufacturing method therefor. The linear photoelectric focal plane detector comprises a photosensitive chip (2) and a readout circuit (1), wherein the upper surface of the readout circuit (1) is provided with a plurality of rows of first metal electrodes (11), the first metal electrodes (11) in each row are arranged in parallel at equal intervals in a row direction, and the first metal electrodes (11) in adjacent rows are arranged in a staggered manner in the row direction; and the photosensitive chip (2) comprises at least one row of photosensitive pixels (21) arranged in parallel, the lower surface of the photosensitive chip (2) is provided with second metal electrodes (22) arranged in parallel at equal intervals in the row direction, and at least one row of second metal electrodes (22) are correspondingly connected to the first metal electrodes (11). A plurality of photosensitive chips (2) of different structures are designed on the basis of one readout circuit (1) in a matching manner, so as to generate linear photoelectric focal plane detectors with different detection scales and center distances between pixels, such that manufacturing costs can be reduced. By using the readout circuit (1) of the same structure, a mechanical interface and electrical properties are effectively prevented from being adjusted, thereby improving the usability of a photoelectric detector.
Inventors:
LI XUE (CN)
LIU DAFU (CN)
LI TAO (CN)
SUN DUO (CN)
LIU DAFU (CN)
LI TAO (CN)
SUN DUO (CN)
Application Number:
PCT/CN2022/140576
Publication Date:
March 21, 2024
Filing Date:
December 21, 2022
Export Citation:
Assignee:
WUXI ZHONGKE DEXIN SENSING TECH CO LTD (CN)
International Classes:
G01J1/44; G01J5/10; H01L27/14
Foreign References:
| CN114361190A | 2022-04-15 | |||
| JP2018006375A | 2018-01-11 | |||
| US20120032145A1 | 2012-02-09 | |||
| JP2013084880A | 2013-05-09 | |||
| US20070170359A1 | 2007-07-26 | |||
| US20140056405A1 | 2014-02-27 |
Attorney, Agent or Firm:
SHANGHAI BESHINING LAW OFFICE (CN)
Download PDF: