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Patent Searching and Data


Title:
LIQUID COMPOSITION FOR FORMING PIEZOELECTRIC FILM AND METHOD FOR FORMING PIEZOELECTRIC FILM IN WHICH SAID LIQUID COMPOSITION IS USED
Document Type and Number:
WIPO Patent Application WO/2019/181656
Kind Code:
A1
Abstract:
The present invention is a liquid composition for forming a piezoelectric film comprising a metal oxide that contains at least Bi, Na, and Ti. The Na feedstock is an Na alkoxide, and the Ti feedstock is a Ti alkoxide, said composition containing a diol and an amine stabilizer, and the molar ratio of the amine stabilizer to the Ti alkoxide (Ti alkoxide:amine stabilizer) being 1:0.5-1:4. The metal oxide content is preferably 4-20 mass% with respect to 100 mass% of the the liquid composition.

Inventors:
DOI Toshihiro (Central Research Institute 1002-14, Mukohyama, Naka-sh, Ibaraki 02, 〒3110102, JP)
SOYAMA Nobuyuki (Central Research Institute 1002-14, Mukohyama, Naka-sh, Ibaraki 02, 〒3110102, JP)
Application Number:
JP2019/010065
Publication Date:
September 26, 2019
Filing Date:
March 12, 2019
Export Citation:
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Assignee:
MITSUBISHI MATERIALS CORPORATION (2-3 Marunouchi 3-chome, Chiyoda-ku Tokyo, 17, 〒1008117, JP)
International Classes:
H01L41/318; C01G29/00; C01G53/00; H01L41/187
Foreign References:
JP2016219825A2016-12-22
JP2016225550A2016-12-28
JP2007290887A2007-11-08
JP2018157182A2018-10-04
Attorney, Agent or Firm:
MATSUNUMA Yasushi et al. (1-9-2, Marunouchi Chiyoda-k, Tokyo 20, 〒1006620, JP)
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