Title:
LIQUID COMPOSITION FOR FORMING PIEZOELECTRIC FILM AND METHOD FOR FORMING PIEZOELECTRIC FILM IN WHICH SAID LIQUID COMPOSITION IS USED
Document Type and Number:
WIPO Patent Application WO/2019/181656
Kind Code:
A1
Abstract:
The present invention is a liquid composition for forming a piezoelectric film comprising a metal oxide that contains at least Bi, Na, and Ti. The Na feedstock is an Na alkoxide, and the Ti feedstock is a Ti alkoxide, said composition containing a diol and an amine stabilizer, and the molar ratio of the amine stabilizer to the Ti alkoxide (Ti alkoxide:amine stabilizer) being 1:0.5-1:4. The metal oxide content is preferably 4-20 mass% with respect to 100 mass% of the the liquid composition.
Inventors:
DOI TOSHIHIRO (JP)
SOYAMA NOBUYUKI (JP)
SOYAMA NOBUYUKI (JP)
Application Number:
PCT/JP2019/010065
Publication Date:
September 26, 2019
Filing Date:
March 12, 2019
Export Citation:
Assignee:
MITSUBISHI MATERIALS CORP (JP)
International Classes:
H01L41/318; C01G29/00; C01G53/00; H01L41/187
Foreign References:
| JP2016219825A | 2016-12-22 | |||
| JP2016225550A | 2016-12-28 | |||
| JP2007290887A | 2007-11-08 | |||
| JP2018157182A | 2018-10-04 | |||
| JP2018054542A | 2018-04-05 | |||
| JP2018149083A | 2018-09-27 |
Other References:
Y. H. JEON ET AL.: "Large Piezoresponse and Ferroelectric Properties of (Bi . Nao.5)TiO3-(Bio.5Ko.5)TiO3-Bi(Mgo. 5Tio. )03 Thin Films Prepared by Chemical Solution Deposition", J. AM. CERAM. SOC., 2013, pages 1 - 7
See also references of EP 3770981A4
See also references of EP 3770981A4
Attorney, Agent or Firm:
MATSUNUMA Yasushi et al. (JP)
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