Title:
LIQUID CRYSTAL PANEL EXPOSURE PROCESS AND MASK THEREOF
Document Type and Number:
WIPO Patent Application WO/2012/071748
Kind Code:
A1
Abstract:
A liquid crystal panel exposure process using an exposure machine for manufacturing multiple liquid crystal panels is provided. The exposure process includes the following steps: exposuring a glass substrate (20) for manufacturing multiple liquid crystal panels by a first mask (10) which is provided with multiple alignment marks corresponding to subsequent multiple masks, so as to form multiple alignment marks on the glass substrate (20) corresponding to the subsequent multiple masks; according to the order of the subsequent multiple masks, performing alignment process and exposure process on the glass substrate (20) by aligning the multiple alignment marks formed on the substrate (20) with the multiple alignment marks of the subsequent multiple masks respectively, so as to create patterns. To the same liquid crystal panel area, the multiple alignment marks needed for the subsequent multiple masks are provided with different coordinate positions on the glass substrate (20).
Inventors:
ZHANG CAILI (CN)
Application Number:
PCT/CN2010/079685
Publication Date:
June 07, 2012
Filing Date:
December 13, 2010
Export Citation:
Assignee:
SHENZHEN CHINA STAR OPTOELECT (CN)
ZHANG CAILI (CN)
ZHANG CAILI (CN)
International Classes:
G02F1/133; G03F1/42; G03F7/20; G03F9/00
Foreign References:
| CN1051310A | 1991-05-15 | |||
| CN1677616A | 2005-10-05 | |||
| JP2004272167A | 2004-09-30 | |||
| JP2007256581A | 2007-10-04 | |||
| US20080096113A1 | 2008-04-24 |
Attorney, Agent or Firm:
ESSEN PATENT & TRADEMARK AGENCY (CN)
深圳翼盛智成知识产权事务所(普通合伙) (CN)
深圳翼盛智成知识产权事务所(普通合伙) (CN)
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Claims: