LIQUID FILM GENERATING DEVICE AND LIQUID FILM CARTRIDGE USED THEREIN

Title:

LIQUID FILM GENERATING DEVICE AND LIQUID FILM CARTRIDGE USED THEREIN

Document Type and Number:

WIPO Patent Application WO/2017/138525

Kind Code:

A1

Abstract:

Liquid that has been pressurized by being sucked up from a recovery tank 11a by means of a pump 12 is ejected from a nozzle of a liquid film cartridge 20 to generate a liquid film 100. The generated liquid film 100 is caused to come into contact with a sloping wall of the liquid film cartridge 20 along a top surface of the liquid film 100, and liquid that runs down from the sloping wall is recovered and is stored in the recovery tank 11a. By means of this configuration, liquid that is running down along the sloping wall in a decelerated state is recovered by the recovery tank 11a, thereby preventing bubbles from forming in the liquid in the recovery tank 11a through mixing when the liquid enters the recovery tank 11a.

Inventors:

WATANABE AKIRA (JP)
DOI BUNPEI (JP)

Application Number:

PCT/JP2017/004404

Publication Date:

August 17, 2017

Filing Date:

February 07, 2017

Export Citation:

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Assignee:

FEMTO DEPLOYMENTS INC (JP)

International Classes:

G01N21/01; G01N1/28; G01N21/3577; G01N21/3586

Domestic Patent References:

WO2013108293A1

2013-07-25

Foreign References:

JP2011127950A	2011-06-30
JP2008051721A	2008-03-06
JP2008241567A	2008-10-09
JPS6156561U	1986-04-16
JP2015219088A	2015-12-07
JP2011214842A	2011-10-27
JPS6140664U	1986-03-14
US5849064A	1998-12-15

Other References: