Title:
LIQUID JET HEAD AND PRODUCTION THEREOF
Document Type and Number:
WIPO Patent Application WO/1993/022140
Kind Code:
A1
Abstract:
A head for jetting a liquid using a piezoelectric device, more particularly a liquid jet head and a method of production thereof which reduces the size, attains a higher density and improves liquid jet characteristics using a PZT thin film piezoelectric device, and has high producibility. A thin piezoelectric device comprising a thin diaphragm (103), a lower electrode (104), a piezoelectric film (105) and an upper electrode (106) is formed on a liquid chamber (102) and a plurality of the devices are disposed on the same substrate. The pitch of disposition of the liquid chambers (102) is the same as that of the nozzles (109), and the dimension of the liquid chambers, the thickness of the piezoelectric films (105) and the thickness of the diaphragm (103) are so constituted as to satisfy a specific relation. A first substrate (101) on which the piezoelectric devices, the liquid chambers (102), etc, are formed and a second substrate (107) on which liquid flow paths (108) are formed are bonded and integrated with each other so as to constitute the liquid jet head. The production method comprises: 1) forming the diaphragms on the substrate and forming the piezoelectric devices on the diaphragms using a thin film forming technique, and then 2) disposing means for protecting the surface of the substrate on the side of the piezoelectric device by a jig, etc, and forming the liquid chambers by etching from the opposite surface. The liquid jet head of this invention is preferably used for a liquid jet recording apparatus for recording characters, image data, etc, on a medium such as paper using an ink.
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Inventors:
HASEGAWA KAZUMASA (JP)
SHIMADA MASATO (JP)
SAWADA MASAYUKI (JP)
SHIMADA MASATO (JP)
SAWADA MASAYUKI (JP)
Application Number:
PCT/JP1993/000524
Publication Date:
November 11, 1993
Filing Date:
April 23, 1993
Export Citation:
Assignee:
SEIKO EPSON CORP (JP)
HASEGAWA KAZUMASA (JP)
SHIMADA MASATO (JP)
SAWADA MASAYUKI (JP)
HASEGAWA KAZUMASA (JP)
SHIMADA MASATO (JP)
SAWADA MASAYUKI (JP)
International Classes:
B41J2/14; B41J2/16; (IPC1-7): B41J2/045
Foreign References:
| JPS58102775A | 1983-06-18 | |||
| JPS585271A | 1983-01-12 | |||
| JPH03297653A | 1991-12-27 | |||
| JPH02258261A | 1990-10-19 | |||
| JPS6233076B2 | 1987-07-18 | |||
| JPS63104844A | 1988-05-10 | |||
| JPS55156073A | 1980-12-04 | |||
| JPS57113940U | 1982-07-14 | |||
| JPS63149159A | 1988-06-21 |
Attorney, Agent or Firm:
Suzuki, Kisaburo (4-1 Nishi-Shinjuku 2-chom, Shinjuku-ku Tokyo 163, JP)
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