LIQUID MANAGEMENT SYSTEM AND RECOVERY AND RECYCLING DEVICE FOR CLEANING LIQUID

WIPO Patent Application WO/2013/094528

A1

A liquid management system (1E) comprising a cleaning liquid supply device, a refining device (17), and a cleaning liquid recovery means. The cleaning liquid supply device: has a mixing tank (4) wherein alcohol and pure water are mixed and a cleaning liquid is made; adjusts the alcohol concentration in the cleaning liquid to within a prescribed concentration range, inside the mixing tank (4); and supplies the cleaning liquid having the concentration thereof adjusted, to a cleaning device (100). The refining device (17) removes impurities from the cleaning liquid discharged from the cleaning device (100), between the mixing tank (4) and the cleaning device (100). The cleaning liquid recovery means is a means that collects the cleaning liquid discharged from the cleaning device (100), concentrates same using a concentrator (16), and returns same to the mixing tank (4); and includes pipes (14a, 14b, 14c, 14g). By using this system, the alcohol concentration of the cleaning liquid including alcohol and pure water can be maintained within a fixed range, and the amount of alcohol added to adjust concentration can be reduced.

MURAYAMA MASAMI (JP)
TAKAHASHI KAZUSHIGE (JP)
SUGAWARA HIROSHI (JP)

PCT/JP2012/082477

June 27, 2013

December 14, 2012

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ORGANO CORP (JP)
MURAYAMA MASAMI (JP)
TAKAHASHI KAZUSHIGE (JP)
SUGAWARA HIROSHI (JP)

H01L21/304; B01D61/14; B01D61/36; C02F1/28; C02F1/42

JP2003297795A	2003-10-17
JPH1116873A	1999-01-22
JPH05111621A	1993-05-07
JPH0957069A	1997-03-04
JPS63305917A	1988-12-13

MIYAZAKI, Teruo et al. (JP)
Akio Miyazaki (JP)

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