Title:
LIQUID MATERIAL VAPORIZATION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2015/111747
Kind Code:
A1
Abstract:
The present invention corrects the water pressure component of a liquid material included in the pressure measured by a pressure sensor, and thereby precisely calculates the flow rate or concentration of material gas, the present invention being provided with: a storage container (2) for storing a liquid material; an introduction channel (3) for introducing carrier gas into the liquid material in the storage container (2); a discharge channel (4) for discharging from the storage container (2) a mixed gas of the carrier gas and the material gas obtained by vaporizing the liquid material; a measured-pressure receiving unit for receiving from a pressure sensor (5) the pressure of the carrier gas flowing through the introduction channel (3); and a computation unit (9) whereby the measured pressure received by the measured-pressure receiving unit is corrected using at least the water pressure of the fluid material, and the flow rate or concentration of the material gas flowing through the discharge channel (4) is calculated or controlled using the corrected pressure obtained by the correction.
Inventors:
AO SHIGEJI (JP)
Application Number:
PCT/JP2015/052085
Publication Date:
July 30, 2015
Filing Date:
January 26, 2015
Export Citation:
Assignee:
HORIBA UK LTD (GB)
HORIBA STEC CO LTD (JP)
HORIBA STEC CO LTD (JP)
International Classes:
B01J7/02; C23C16/448; G01F15/04; H01L21/205; H01L21/31
Foreign References:
| JPH034929A | 1991-01-10 | |||
| JP2013222768A | 2013-10-28 | |||
| JPH08203832A | 1996-08-09 | |||
| JPH07211646A | 1995-08-11 | |||
| JPH0196922A | 1989-04-14 |
Attorney, Agent or Firm:
NISHIMURA, RYUHEI (JP)
Ryuhei Nishimura (JP)
Ryuhei Nishimura (JP)
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