Title:
LIQUID-METAL ION SOURCE
Document Type and Number:
WIPO Patent Application WO2004057643
Kind Code:
A3
Abstract:
The invention relates to a liquid-metal ion source comprising an electro-conductive housing (2) which is preferably made of metal and provided with a hollow space (4) for liquid or fusable metal (3), preferably indium, or a metal alloy. The hollow space (4) is connected to a capillary passage (5b) which extends through an emission body (5) protruding from the wall of a housing (2a). According to said invention, the capillary passage (5b) has a circular cross section whose diameter (rc) ranges from 1 to 100 µm, preferably from 3 to 10µm, at the level of the opening thereof (5a) in the emission body (5).
Inventors:
TAJMAR MARTIN (AT)
SEMERAD ERNST (AT)
SEMERAD ERNST (AT)
Application Number:
PCT/AT2003/000370
Publication Date:
July 14, 2005
Filing Date:
December 17, 2003
Export Citation:
Assignee:
ARC SEIBERSDORF RES GMBH (AT)
TAJMAR MARTIN (AT)
SEMERAD ERNST (AT)
TAJMAR MARTIN (AT)
SEMERAD ERNST (AT)
International Classes:
F03H1/00; H01J27/22; H01J27/26; (IPC1-7): H01J27/26; F03H1/00
Foreign References:
| US4328667A | 1982-05-11 |
Other References:
MITTERAUER J: "MINIATURIZED LIQUID METAL ION SOURCES (MILMIS)", IEEE TRANSACTIONS ON PLASMA SCIENCE, IEEE INC. NEW YORK, US, vol. 19, no. 5, 1 October 1991 (1991-10-01), pages 790 - 799, XP000244041, ISSN: 0093-3813
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