Title:
LIQUID PLASMA JET SPRAYING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/111520
Kind Code:
A1
Abstract:
The present invention relates to a liquid plasma jet spraying device and provides a liquid plasma jet spraying device comprising: a power supply unit for supplying electric power; a plasma nozzle, as a cylindrical chamber provided with a nozzle unit, for converting a liquid or a mixed fluid including liquid and a gas that flow therein to a plasma state and spraying the plasma; and an electrode unit formed inside the plasma nozzle, for applying a voltage supplied from the power supply unit to the liquid or the mixed fluid including the liquid and the gas and converting same to a plasma state. The electrode unit includes: an inner electrode electrically connected to the power supply unit; and a dielectric tube surrounding the inner electrode.
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Inventors:
HONG YONG CHEL (KR)
KIM KANG IL (KR)
KIM JI HUN (KR)
HUH JIN YOUNG (KR)
KIM KANG IL (KR)
KIM JI HUN (KR)
HUH JIN YOUNG (KR)
Application Number:
PCT/KR2016/015149
Publication Date:
June 29, 2017
Filing Date:
December 23, 2016
Export Citation:
Assignee:
KOREA BASIC SCIENCE INST (KR)
International Classes:
B05B5/16; B01D47/06; B05B1/02; B05B1/24; B05B5/00; B05B7/02; B05B7/22; B08B3/02; H01L21/67
Foreign References:
KR20090112831A | 2009-10-29 | |||
KR20060018420A | 2006-03-02 | |||
KR20130017701A | 2013-02-20 | |||
KR20100107290A | 2010-10-05 | |||
KR100817038B1 | 2008-04-07 |
Attorney, Agent or Firm:
CHANG & HAN PATENT & LAW FIRM (KR)
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