LIQUID RAW MATERIAL VAPORIZER

WIPO Patent Application WO/2010/122972

A1

A liquid raw material vaporizer which minimizes the bloating of bubbles by preventing recombination of bubbles and equalizes the temperature distribution of stored liquid raw material comprises a liquid raw material container (2), a first heater (3) mounted on the sidewall of the liquid raw material container (2) in order to heat the stored liquid raw material to a predetermined temperature, a second heater (4) provided at the central part in the liquid raw material container (2) in order to heat the stored liquid raw material to a predetermined temperature, a plurality of bubble generators (5) provided between the second heater (4) and the sidewall while being immersed in the stored liquid raw material in order to bubble the liquid raw material by discharging carrier gas into the liquid raw material, and a gas supply pipe (6) which supplies carrier gas to the bubble generators (5).

IEKI, Takayuki (Co. Ltd., 11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto-sh, Kyoto 16, 〒6018116, JP)
家城　孝之 (〒16 京都府京都市南区上鳥羽鉾立町１１番地５　株式会社堀場エステック内 Kyoto, 〒6018116, JP)

JP2010/056908

October 28, 2010

April 19, 2010

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HORIBA STEC, Co., Ltd. (11-5, Hokodate-cho Kamitoba, Minami-ku, Kyoto-sh, Kyoto 16, 〒6018116, JP)
株式会社堀場エステック (〒16 京都府京都市南区上鳥羽鉾立町１１番地５ Kyoto, 〒6018116, JP)
IEKI, Takayuki (Co. Ltd., 11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto-sh, Kyoto 16, 〒6018116, JP)

C23C16/448; B01J7/02; H01L21/31

NISHIMURA, Ryuhei (3F Karasumanijyo Bldg, 267 Makieya-cho, Nijyo-agaru, Karasuma-dori, Nakagyo-ku, Kyoto-cit, Kyoto 57, 〒6040857, JP)

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