Title:
LIQUID SUPPLY DEVICE FOR MAINTAINING FIXED PRESSURE
Document Type and Number:
WIPO Patent Application WO/2019/135483
Kind Code:
A1
Abstract:
Disclosed are a liquid supply device for maintaining a fixed pressure and a liquid supply method using the same. The liquid supply device for maintaining a fixed pressure is capable of economically supplying chemicals very stably by maintaining a constant fixed pressure at a final supply stage in such a manner that a main nitrogen (N2) gas supply means and a nitrogen (N2) gas pressurizing means for finely adjusting a pressure are installed in a vessel that accommodates a liquid supplied at a variable liquid supply pressure, and the operation is controlled by monitoring the pressure inside the vessel in real time. A liquid which is maintained at a constant pressure is received in the vessel (10) of the liquid supply device (100) for maintaining a fixed pressure, an appropriate amount of liquid for maintaining a constant pressure is supplied to the vessel (10) by means of the main liquid supply means (20), the main nitrogen (N2) gas for maintaining a constant fixed pressure is supplied to the vessel (10) by means of a primary pressurizing means (30), a nitrogen (N2) gas is additionally supplied or discharged so as to finely adjust a pressure difference between the supply pressure of the liquid and the fixed pressure of the main nitrogen (N2) gas by means of a secondary pressurizing means (40), a liquid level in the vessel (10) is detected by a water level sensor (60), and an discharging pressure of the liquid to be discharged from the vessel (10) is kept constant by an output stage pressure maintaining means (70).
Inventors:
LEE YEON BEOM (KR)
LIM TEG KYU (KR)
LIM KUNE BOK (KR)
CHO HO JOON (KR)
KIM SUNG SOO (KR)
AN CHOUL SU (KR)
KIM CHUL YOUNG (KR)
YANG SEUNG HWA (KR)
LIM TEG KYU (KR)
LIM KUNE BOK (KR)
CHO HO JOON (KR)
KIM SUNG SOO (KR)
AN CHOUL SU (KR)
KIM CHUL YOUNG (KR)
YANG SEUNG HWA (KR)
Application Number:
PCT/KR2018/013525
Publication Date:
July 11, 2019
Filing Date:
November 08, 2018
Export Citation:
Assignee:
C&G HI TECH CO LTD (KR)
International Classes:
H01L21/67
Foreign References:
| KR20090006269A | 2009-01-15 | |||
| JPH1162838A | 1999-03-05 | |||
| KR19990053811A | 1999-07-15 | |||
| KR20060129880A | 2006-12-18 | |||
| KR20160117259A | 2016-10-10 |
Attorney, Agent or Firm:
STYP PATENT LAW FIRM (KR)
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