Title:
LIQUID SUPPLY DEVICE AND LIQUID SUPPLY METHOD
Document Type and Number:
WIPO Patent Application WO/2017/077730
Kind Code:
A1
Abstract:
This liquid supply device 10a has a first liquid flow path 21 and a second liquid flow path 22 that connect a suction port 13 and a discharge port 14. The first liquid flow path 21 is provided with a first pump 25 and the second liquid flow path 22 is provided with a second pump 26 that performs a suction operation when the first pump 25 performs a discharge operation and performs a discharge operation when first pump performs a suction operation. A three-way valve 42a serving as a switching valve mechanism 41 switches between a first pump flow path filling mode for filling the first liquid flow path 21 with a liquid, a second pump flow path filling mode for filling the second liquid flow path 22 with the liquid, and a continuous discharge mode that connects the first liquid flow path 21 and the second liquid flow path 22 with the suction port 13 and the discharge port 14, respectively.
More Like This:
Inventors:
YAJIMA TAKEO (JP)
Application Number:
PCT/JP2016/067249
Publication Date:
May 11, 2017
Filing Date:
June 09, 2016
Export Citation:
Assignee:
KOGANEI LTD (JP)
International Classes:
F04B53/06; F04B13/00; F04B23/06; F04B53/10
Foreign References:
JP2003107065A | 2003-04-09 | |||
JP2001207951A | 2001-08-03 | |||
JP2007327845A | 2007-12-20 |
Attorney, Agent or Firm:
TSUTSUI & ASSOCIATES (JP)
Download PDF:
Previous Patent: SEMICONDUCTOR MODULE AND METHOD FOR MANUFACTURING SAME
Next Patent: MELT TRANSFER PUMP AND MELT TRANSFER SYSTEM
Next Patent: MELT TRANSFER PUMP AND MELT TRANSFER SYSTEM