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Title:
LIQUID SUPPLY DEVICE AND LIQUID SUPPLY METHOD
Document Type and Number:
WIPO Patent Application WO/2019/117043
Kind Code:
A1
Abstract:
This liquid supply device supplies a processing liquid to a processing liquid discharge unit that discharges the processing liquid onto an object to be processed, and comprises: a supply line that is connected to the processing liquid discharge unit; a filter that is interposed in the supply line, and filters the processing liquid to remove foreign matter; and a control unit that is configured to determine the condition of the processing liquid supplied to a primary side of the filter, and if it is determined that the condition of the processing liquid is poor, to output a control signal that limits the supply of the processing liquid to the primary side of the filter.

Inventors:
NAITOU, Ryouichirou (1-1 Fukuhara, Koshi Cit, Kumamoto 16, 〒8611116, JP)
HAYASHI, Masato (1-1 Fukuhara, Koshi Cit, Kumamoto 16, 〒8611116, JP)
SHITE, Hideo (1-1 Fukuhara, Koshi Cit, Kumamoto 16, 〒8611116, JP)
IDE, Hiroyuki (1-1 Fukuhara, Koshi Cit, Kumamoto 16, 〒8611116, JP)
KAMEDA, Yosuke (1-1 Fukuhara, Koshi Cit, Kumamoto 16, 〒8611116, JP)
TOTSUKA, Seiya (1-1 Fukuhara, Koshi Cit, Kumamoto 16, 〒8611116, JP)
MAITA, Atsumu (1-1 Fukuhara, Koshi Cit, Kumamoto 16, 〒8611116, JP)
SATOH, Takami (1-1 Fukuhara, Koshi Cit, Kumamoto 16, 〒8611116, JP)
ARAKI, Hirofumi (1-1 Fukuhara, Koshi Cit, Kumamoto 16, 〒8611116, JP)
YOSHIHARA, Kentaro (1-1 Fukuhara, Koshi Cit, Kumamoto 16, 〒8611116, JP)
Application Number:
JP2018/045152
Publication Date:
June 20, 2019
Filing Date:
December 07, 2018
Export Citation:
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Assignee:
TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku Tokyo, 25, 〒1076325, JP)
International Classes:
H01L21/027; B05C5/00; B05C11/00; G03F7/26
Foreign References:
JP2015230899A2015-12-21
JP2016103590A2016-06-02
JP2004327747A2004-11-18
JP2017191821A2017-10-19
JP2013211525A2013-10-10
JP2005051008A2005-02-24
JP2010135535A2010-06-17
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (Akebono International, Kakubari Building 1-20, Sumiyoshi-cho, Shinjuku-k, Tokyo 65, 〒1620065, JP)
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