Title:
LIQUID SUPPLY DEVICE, OBJECTIVE LENS HOLDING DEVICE, MICROSCOPE, AND LIQUID SUPPLY METHOD
Document Type and Number:
WIPO Patent Application WO/2018/182020
Kind Code:
A1
Abstract:
[Problem] To enable accurate adjustment of an amount of a liquid when said liquid is being held in a space between an observation target object and an objective lens.
[Solution] This liquid supply device is provided with a supply port for supplying a liquid between an objective lens and an observation target object, and a recovery port for recovering the liquid supplied from the supply port, wherein the supply port and the recovery port satisfy one or both of a condition that the positions thereof in the direction of the optical axis of the objective lens differ from one another, and a condition that the positions thereof relative to the optical axis in a direction perpendicular to the optical axis of the objective lens differ from one another.
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Inventors:
YASOKAWA TOSHIKI (JP)
Application Number:
PCT/JP2018/013989
Publication Date:
October 04, 2018
Filing Date:
March 30, 2018
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G02B21/24; G01N1/28
Foreign References:
| JP2008170867A | 2008-07-24 | |||
| JP2006308676A | 2006-11-09 | |||
| US20060021569A1 | 2006-02-02 | |||
| JP2015227940A | 2015-12-17 | |||
| US20150212310A1 | 2015-07-30 |
Other References:
See also references of EP 3605184A4
Attorney, Agent or Firm:
NISHI, Kazuya (JP)
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