Title:
LIQUID VAPORIZATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2011/040067
Kind Code:
A1
Abstract:
Disclosed is a liquid vaporization system which is capable of promoting vaporization of liquid material without problems caused by unvaporized matter. The liquid vaporization system (10) comprises a liquid vaporization assembly (20). This assembly (20) comprises a pump (11) and a vaporizer (12). The vaporizer (12) comprises a case (21), a heater placed inside the case (21), a heat-accumulating plate (23) heated by the heater, and a mesh (24) placed on the heat-accumulating plate (23). The mesh (24) is formed by interweaving a wire material (24a) in a flat plate shape as a whole. By overlaying the mesh (24) on the top face of the heat-accumulating plate (23), fine roughness is provided on the heat-accumulating plate (23) by the mesh (24). Above the mesh (24), a nozzle (27) is provided. From the nozzle (27), liquid material is dropped onto the heat-accumulating plate (mesh (24)). The liquid material spreads in a thin film state over the heat-accumulating plate (23), and is heated and vaporized on the upper face of the heat-accumulating plate (23).
Inventors:
KOUKETSU, Masayuki (Ouji 2-chomeKomaki-sh, Aichi 51, 〒4858551, JP)
纐纈 雅之 (〒51 愛知県小牧市応時二丁目２５０番地 シーケーディ株式会社内 Aichi, 〒4858551, JP)
纐纈 雅之 (〒51 愛知県小牧市応時二丁目２５０番地 シーケーディ株式会社内 Aichi, 〒4858551, JP)
Application Number:
JP2010/055652
Publication Date:
April 07, 2011
Filing Date:
March 30, 2010
Export Citation:
Assignee:
CKD CORPORATION (250Ouji 2-chome, Komaki-shi Aichi, 51, 〒4858551, JP)
シーケーディ株式会社 (〒51 愛知県小牧市応時二丁目２５０番地 Aichi, 〒4858551, JP)
KOUKETSU, Masayuki (Ouji 2-chomeKomaki-sh, Aichi 51, 〒4858551, JP)
シーケーディ株式会社 (〒51 愛知県小牧市応時二丁目２５０番地 Aichi, 〒4858551, JP)
KOUKETSU, Masayuki (Ouji 2-chomeKomaki-sh, Aichi 51, 〒4858551, JP)
International Classes:
B01D1/22; B01J7/00; H01L21/027
Attorney, Agent or Firm:
YAMADA, Tsuyoshi (Daiichi Hasegawa Bldg.6F, 13-24Meieki 3-chome,Nakamura-ku,Nagoya-sh, Aichi 02, 〒4500002, JP)
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