Title:
LIQUID VAPORIZER
Document Type and Number:
WIPO Patent Application WO/2012/098730
Kind Code:
A1
Abstract:
The invention provides a liquid vaporizer (100) that vaporizes a chemical solution supplied from a chemical solution supply port and mixes same into a gaseous medium. The liquid vaporizer (100) is provided with a main vaporizer body (110) having a mixed gas-generating space (116), and a vaporizing part (120) disposed inside the mixed gas-generating space (116). The vaporizing part (120) has a main vaporizing part body (121) whereon a vaporization surface (87) is formed and a reticular body (69) formed as a sheet by weaving wires evenly into a mesh. The reticular body (69) forms multiple mesh spaces that are spaces surrounded by the wires and are disposed in a regular pattern in the plane of the reticular body (69). The vaporizing part (120) forms multiple chemical solution-supplying spaces that are spaces surrounded by the wires and the vaporization surface (87) as a result of the reticular body (69) and the vaporization surface (87) contacting each other and that are disposed in a regular pattern in the plane of the reticular body (69).
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Inventors:
KOUKETSU MASAYUKI (JP)
ITAFUJI HIROSHI (JP)
ITAFUJI HIROSHI (JP)
Application Number:
PCT/JP2011/069960
Publication Date:
July 26, 2012
Filing Date:
September 01, 2011
Export Citation:
Assignee:
CKD CORP (JP)
KOUKETSU MASAYUKI (JP)
ITAFUJI HIROSHI (JP)
KOUKETSU MASAYUKI (JP)
ITAFUJI HIROSHI (JP)
International Classes:
B01J7/02; B01F23/10; H01L21/027; H01L21/304
Foreign References:
| JPS4952175A | 1974-05-21 | |||
| JPH07155584A | 1995-06-20 | |||
| JPH09152287A | 1997-06-10 | |||
| JP2002228117A | 2002-08-14 |
Attorney, Agent or Firm:
YAMADA, TSUYOSHI (JP)
Yamada Strength (JP)
Yamada Strength (JP)
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Claims: