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Title:
LITHIUM TANTALATE SUBSTRATE AND PROCESS FOR PRODUCING THE SAME
Document Type and Number:
WIPO Patent Application WO/2005/038097
Kind Code:
A1
Abstract:
A process characterized in that an LT substrate obtained by forming lithium tantalate crystal grown by the Czochralski method into a substrate is buried in a powdery mixture of Al and Al2O3 and heat treated at a temperature maintained at 350 to 600°C to thereby obtain a lithium tantalate substrate whose volume resistivity is controlled so as to range from over 108 to below 1010 &ohm ·cm. No pyroelectricity is observed on the thus obtained substrate, and the substrate undergoes a change from colorless transparency to colored opaqueness and satisfactorily has properties as a piezoelectric material.

Inventors:
KAJIGAYA TOMIO (JP)
KAKUTA TAKASHI (JP)
Application Number:
PCT/JP2004/015189
Publication Date:
April 28, 2005
Filing Date:
October 07, 2004
Export Citation:
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Assignee:
SUMITOMO METAL MINING CO (JP)
KAJIGAYA TOMIO (JP)
KAKUTA TAKASHI (JP)
International Classes:
C01G35/00; C30B29/30; C30B33/02; H01L37/02; H01L41/18; H01L41/39; (IPC1-7): C30B29/30; C30B33/02
Domestic Patent References:
WO2001033260A12001-05-10
Foreign References:
JPS6335499A1988-02-16
JPS63210100A1988-08-31
JPS539279A1978-01-27
JP2004269300A2004-09-30
Attorney, Agent or Firm:
Ueda, Shozo (25-Sankyo Bldg. 1-48-10, Higashi-Ikebukur, Toshima-ku Tokyo 13, JP)
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