Title:
LITHOGRAPHY DEVICE WITH EDDY-CURRENT BRAKE
Document Type and Number:
WIPO Patent Application WO/2013/124052
Kind Code:
A3
Abstract:
A lithography device (10) includes an eddy-current brake (30, 70) for damping the movement of a structural element (13) of the lithography device (10). The eddy-current brake (30, 70) includes a plurality of magnets disposed in an arc-shaped arrangement, and a plurality of electrically conductive sheets (35, 67) arranged respectively between adjacent ones of said magnets. A relative movement between the magnets and the electrically conductive sheets in a direction to be damped inducing eddy currents in the electrically conductive sheets.
Inventors:
VOGLER ALEXANDER (DE)
HAUF MARKUS (DE)
HAUF MARKUS (DE)
Application Number:
PCT/EP2013/000480
Publication Date:
December 19, 2013
Filing Date:
February 19, 2013
Export Citation:
Assignee:
ZEISS CARL SMT GMBH (DE)
International Classes:
G03F7/20
Domestic Patent References:
| WO2009062606A1 | 2009-05-22 |
Foreign References:
| US20050140961A1 | 2005-06-30 | |||
| EP1862856A1 | 2007-12-05 | |||
| EP2339205A2 | 2011-06-29 |
Attorney, Agent or Firm:
HORN KLEIMANN WAITZHOFER (Munich, DE)
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