received by the International Bureau on 10 October 2016 (10.10.2016)

1. A load lock system for transferring a substrate into and out of a lithography system, the load lock system comprises :

a load lock chamber provided with an opening in the load lock chamber for allowing passage of the substrate from within the load lock chamber to outside of the load lock chamber, and

a transfer apparatus comprising a sub-frame at least partially arranged in the load lock chamber, an arm which is, with a proximal end thereof, connected to the sub-frame, and a substrate receiving unit which is connected to a distal end of the arm,

wherein the arm comprises at least three hinging arm parts,

which are arranged to form a four-bar linkage which is arranged to guide the arm in a predetermined transfer motion for moving at least part of the substrate receiving unit through the opening, wherein the four-bar linkage consists of four rigid linkages,

wherein the sub-frame comprises hinge points which are arranged for connecting a proximal end of the first and second arm parts to the sub-frame, wherein the part of the sub-frame between the hinge points provides a ground linkage for the four-bar linkage,

wherein the first and second arm parts provide two adjacent links which extend from the sub-frame towards a third arm part,

wherein the third arm part is provided with hinge points which are arranged, for connecting a distal end of the first and second arm parts to the third arm part, and wherein the part of the third arm between the hinge points provides a further link for the four-bar linkage.

2. The .load lock system according to claim 1 , wherein the load lock system further comprises an arm transfer drive for driving the arm. for moving at least part of the substrate receiving unit through the opening, wherein the first arm part, in particular the proximal end thereof, is rotationally mounted around an axis, preferably a generally vertical extending axis, and wherein the arm transfer drive is coupled or is arranged to be coupled to said first arm, part.

3. A load lock system for transferring a substrate into and out of a lithography system, the load lock system comprises:

a load lock chamber provided with an opening in the load lock chamber for allowing passage of the substrate from within the load lock chamber to outside of the load lock chamber, and

a transfer apparatus comprising a. sub-frame at least partially arranged in the load lock chamber, an arm which is, with a proximal end thereof, connected to the sub-frame, and a substrate receiving unit which is connected to a distal end of the arm,

wherein the arm comprises at least three hinging arm parts, wherein a first and a second arm part of said three hinging arm part3 are hingedly connected to the sub- frame with a proximal end of the first and second arm, parts, and wherein a third arm part of said three hinging arm parts is hingedly connected to the distal ends of the first and second arm parts respectively,

wherein the at least three hinging arm parts are arranged to form an at least four-bar linkage which is arranged to guide the arm in a predetermined transfer motion for moving at least part of the substrate receiving unit through the opening,

wherein the transfer apparatus comprises an arm transfer drive for driving only the first arm part with respect to the sub-frame, and wherein the predetermined transfer motion is defined by the dimensions of the individual four rigid links of the four-bar linkage.

4. The load lock system according to claim 1, 2 or 3, wherein four-bar linkage comprises at least three bearings .

5. The load lock system according to claim 1, 2, 3 or 4, wherein the substrate receiving unit is rigidly connected to the third arm part.

6. The load lock system, according to any one of the previous claims, wherein the substrate receiving unit comprises hinge points which are arranged for connecting the first and second arm parts, in particular the distal end.3 thereof.

7. The load lock system according to any one of the previous claims, wherein one of the first and second arm. parts is arranged at least partially below the other one of the first and second arm parts, preferably such that the first arm part and the second arm part can be arranged in a position wherein the one arm. part crosses the other arm part.

8. The load lock system according to any one of the previous claims, wherein the predetermined transfer motion is arranged to provide a substantially linear path, in particular for the substrate receiving unit at or near the opening .

9. The load lock system according to any one of the previous claims, wherein the transfer apparatus is movable between a retracted, position and an extended position, wherein in the exteHded position of the transfer apparatus, the substrate receiving unit is at least partially arranged to pass through the opening.

10- The load lock system according to claim 9, when, depending on claim 7, wherein, the first and second arm parts are arranged in a cross-over position in the retracted position.

11. The load lock system according to claim 9 or

10, wherein, the transfer apparatus comprises a first stop unit which defines the extended position.

12. The load lock system according to claim 11, wherein the first stop unit comprises an end stop, which mechanically limits the movement of the four-bar linkage.

13. The load lock system according to claim 11 or 12, wherein the first stop unit comprises a first stop configuration system for adjusting a position of the first stop unit, in particular the end stop thereof.

14. The load lock system according to claim 11, 12 or 13, wherein the first stop unit comprises a first member arranged on the first arm part, and a second member arranged on the second arm part, wherein the first and second member are arranged to abut in the extended position to form the end stop.

15. The load lock system according to any one of the claims 9 - 14, wherein the transfer apparatus comprises a second stop unit which defines the retracted position.

16. The load lock system according to claim 15, wherein the second stop unit comprises a detector for detecting whether or not. the transfer apparatus is arranged in the retracted position.

17. The load lock system according to claim 16, wherein the detector is arranged for detecting the presence of an arm part, in particular the first arm, part, in the retracted position.

18. The load lock system according to claim. 16 or 17, wherein the detector is arranged on and/or attached to the sub-frame.

19. The load lock system according to claim 15, 16, 17 or 18, wherein the second stop unit comprises a second stop configuration system for adjusting a position of the second stop unit, in particular the detector thereof.

20. The load lock system according to any one of the claims 15 - 19, wherein dependent of any one of the claims 11 - 14, wherein the detector of the second stop unit, is arranged to detect the presence of the first or second member of the first stop unit in the retracted position.

21. The load lock system according to any one of the previous claims, wherein the sub-frame is movable relative to the load lock chamber along a substantially vertical axis.

22. The load, lock system according to claim 21, wherein the sub-frame is arranged on a movable carrier, wherein the load lock system comprises a sub-frame drive, coupled to said movable carrier for driving movement of the sub-frame relative to said load lock chamber along the substantially vertical axis.

23. The load lock system according to claim 21 or 22, wherein the opening is arranged at an operational height, and wherein the load lock system further comprises an arm transfer drive for providing a drive force for driving the transfer motion of the arm,

wherein the sub-frame is movable relative to the arm transfer drive along said substantially vertical axis for moving the substrate receiving unit between the operational height and. a non-operational height different from said operational height,

wherein the arm transfer drive is arranged such that movement of the sub-frame relative ^' to the arm transfer drive along the substantially vertical axis from. the non-operational height to the operational height causes the arm transfer drive to couple to the arm for transmitting the drive force to the arm, and

wherein the arm transfer drive is arranged such that movement of said sub-frame relative to the arm transfer drive along said substantially vertical axis from the operational height to said non-operational height causes the arm transfer drive to uncouple from, the arm.

24. The load lock system according to any one of the previous claims, wherein the load lock system, comprises a sub-frame locking system for preventing the sub-frame to be moved in the vertical direction unless the transfer apparatus is in the retracted position in the load lock chamber.

25. The load lock system according to any one of the previous claims, wherein the transfer apparatus comprises a transfer locking system for holding the transfer apparatus in the retracted position, in the load lock chamber.

26. The load lock system according to any one of the previous claims, wherein at least one arm part of each of the arm parts comprises a configuration unit arranged for adjustment of a length of at least one of said arm part3 -

27. The Load lock system according to claim 26, wherein, when the arm. is in the extended position, the configuration unit is accessible to an operator for adjusting the four-bar linkage.

28. The load lock system according to any one of the previous claims, wherein the transfer apparatus is a first transfer apparatus, and wherein the load lock system further comprises a second transfer apparatus, wherein the second transfer apparatus comprising a sub-frame at least partially arranged in the load lock chamber, an arm which is, with a proximal end thereof, connected to the sub- frame, and a substrate receiving unit which is connected to a distal end of the arm,

wherein the arm comprises at least three hinging arm parts, wherein a first and a second arm part of said three hinging arm parts are hingedly connected to the sub- frame with a proximal end of the first and second arm parts, and wherein a third arm part of said three hinging arm parts is hingedly connected to the distal ends of the first and second arm parts respectively,

wherein the at least three hinging arm parts are arranged to form an at least four-bar linkage which is arranged to guide the arm in a predetermined transfer motion for moving at least part of the substrate receiving unit through the opening.

29. The load lock system according to claim 28, wherein the second transfer apparatus is arranged substantially vertically below the first transfer apparatus .

30. The load lock system according to claim 28 or 29, wherein the sub-frame of the second transfer apparatus is arranged on a movable carrier.

31. The load lock system, according to claim 28 or 29, when dependent on claim 22, wherein both sub-frames of the first and second transfer apparatuses are both arranged on the movable carrier.

32. The load lock system according to any on® of the claims 28 - 31, wherein the load lock system comprises a particle shield extending in a plane between the first and second transfer apparatuses.

33. The load lock system according to claim 32, wherein the particle shield is arranged to extend at least partially above the substrate receiving unit of the second transfer apparatus, in particular when the second transfer apparatus is in the retracted position.

34. The load lock system according to claim 32 or

33, wherein, the particle shield is supported by the sub- frame and/or movable carrier.

35- A lithography system comprising a load lock system according to any one of the previous claims.

36. The lithography system according to claim 35, wherein the lithography system comprises a vacuum chamber arranged outside of and/or adjacent to said load lock chamber, wherein the opening is a passage between the vacuum chamber of the lithography system and the load lock system.

37. A method of loading a substrate into a lithography system from a load lock system, wherein the load lock system comprises a load, lock chamber and a transfer apparatus comprising a sub-frame at least partially arranged in the load lock chamber, an arm which is, with a proximal end thereof, movably connected to the sub-frame, and a substrate receiving unit which is connected to a distal end of the arm, wherein the method comprises the steps of:

receiving a substrate on the substrate receiving unit of the transfer apparatus in the load lock chamber,- - extending the transfer apparatus in order to transfer at least part of the substrate receiving unit with the substrate through an opening between the load lock chamber and the lithography system;

placing the substrate in the lithography system; - retracting the transfer apparatus from. the lithography system back into the load lock chamber; and closing the opening;

wherein the arm comprises an at least four-bar linkage, which is arranged to guide the arm and the substrate receiving unit in a predetermined transfer motion when extending and retracting the transfer apparatus, wherein the four-bar linkage consists of four rigid linkages,

wherein the sub-frame comprises hinge points which are arranged for connecting a proximal end of the first and second arm parts to the sub-frame, wherein the part of the sub-frame between the hinge points provides a ground linkage for the four-bar linkage,

wherein the first and second arm parts provide two adjacent links which extend from, the sub-frame towards a third arm part,

wherein the third, arm part is provided with hinge points which are arranged for connecting a distal end of the first and second arm parts to the third arm part, and wherein the part of the third arm between the hinge points provides a further link for the four-bar linkage.

38. A method of loading a substrate into a lithography system from a load lock system, wherein the load lock system comprises a load lock chamber and a transfer apparatus comprising a sub-frame at least partially arranged in the load lock chamber, an arm which is, with a proximal end thereof, movably connected to the sub-frame, and a substrate receiving unit which is connected to a distal end of the arm, wherein the method comprises the steps of:

receiving a substrate on the substrate receiving unit of the transfer apparatus in the load lock chamber;

extending the transfer apparatus in order to transfer at least part of the substrate receiving unit with the substrate through an opening between the load lock chamber and. the lithography system;

- placing the substrate in the lithography system; retracting the transfer apparatus from the lithography system back into the load lock chamber; and

closing the opening;

wherein the arm comprises at least three hinging arm parts, wherein a first and a second arm part of said three hinging arm parts are hingedly connected to the sub- frame with a proximal end of the first and second arm parts, and wherein a third arm. part of said three hinging arm parts is hingedly connected to the distal ends of the first and second arm parts respectively,

wherein the at least three hinging arm parts are arranged to form a four-bar linkage which is arranged, to guide the arm and the substrate receiving unit in a predetermined transfer motion when extending and, retracting the transfer apparatus,

wherein the transfer apparatus comprises an arm transfer drive for driving only the first arm part with respect to the sub-frame, and wherein the predetermined transfer motion is defined, by the dimensions of the individual four rigid links of the four-bar linkage.

39. The method of claim 37 or 38, wherein the lithography system further comprises a vacuum chamber, the method, further comprises the step of:

reducing the pressure in the load lock chamber and opening the opening to the vacuum chamber before the substrate is transferred into the vacuum chamber.

40. A load lock system for a lithography system, wherein the lithography system is adapted for processing a substrate, the load lock system comprising:

a load, lock chamber provided, with an opening at an operational height for allowing passage of the substrate from within the load lock chamber to outside of the load lock chamber,

a load lock transfer apparatus at least partially arranged in the load lock chamber, comprising an arm for receiving the substrate and. for transferring said substrate through the opening,

wherein the arm is movable within the load lock chamber along a substantially vertical axis between the operational height and a non-operational height different from said operational height,

an arm transfer drive for providing a drive force for driving a transfer movement of the arm through the opening,

wherein the arm is movable relative to the arm transfer drive along said substantially vertical axis,

wherein the arm transfer drive is arranged such that movement of the arm relative to the arm, transfer drive along the substantially vertical axis from the non- operational height to the operational height causes the arm transfer drive to couple to the arm for transmitting the drive force to the arm, and

wherein the arm transfer drive is arranged such that movement of said arm relative to the arm transfer drive along said substantially vertical axis from the operational height to said non-operational height causes the arm transfer drive to uncouple from the arm..

41. Load lock system, according to claim 40, further comprising an arm transfer transmission unit for transmitting the drive force of the arm transfer drive to the arm..

42. Load lock system according to claim 40 or 41, wherein the arm transfer drive comprises a keyed joint, comprising a shaft having a key and wherein the arm comprises a respective key seat for coupling the arm transfer drive to the arm, preferably wherein the key is arranged at or near the operational height.

43. Load lock system according to any one of claims 40 - 42, wherein the arm. is a first arm and the load lock transfer apparatus further comprises a second arm spaced apart from the first arm along the substantially vertical axis ,

wherein the second arm is movable within the load lock chamber along said substantially vertical axis between the operational height and a non-operational height different from, said operational height ;

wherein the arm transfer drive is further arranged for providing a drive force for driving a transfer movement of the second arm through the opening;

wherein the second arm is movable relative to said arm transfer drive along said substantially vertical axis, wherein the arm transfer drive is arranged such that movement of the second arm relative to the arm transfer drive along the substantially vertical axis from the non-operational height to the operational height causes the arm transfer drive to couple to the second arm for transmitting the drive force to the arm, and

wherein the arm transfer drive is arranged such that movement of said second arm relative to the arm transfer drive along said substantially vertical axis from the operational height to said non-operational height causes the arm transfer drive to uncouple from the second arm.

44. Load lock system according to claim 43, wherein the second arm, comprises a key seat for engaging the key of the keyed joint of the arm transfer transmission unit for transmitting the drive force of to the second arm when the second arm is at operational height.

45. Load lock system according to claim 43 or 44, wherein the arm transfer drive comprises a single motor for driving the transfer movement of the first and the second arm, at least the one of said first and second arm which is coupled to the arm transfer drive.

46. Load lock system according to claim 43, 44 or 45, wherein the load lock transfer apparatus comprises a sub-frame, wherein both the first arm and the second arm are carried by said sub-frame, wherein the sub-frame is movable along the substantially vertical axis to position either the first arm or the second arm at the operational height .

47. Load lock system according to claim 46, wherein the sub-frame is provided with a sub-frame locking system for locking the position of the sub-frame along . the vertical axis when one of the arms is extended.

48- Load lock system according to any one of the claims 43 - 47, wherein the first arm and the second arm are arranged at a fixed distance to each other along the substantially vertical axis.

49. Load, lock system according to any one of claims 40 - 48, wherein, the arm transfer drive is at least partially arranged outside the load lock chamber, and wherein the arm transfer drive preferably comprises a vacuum seal.

50. Lithography system comprising a load lock system according to any one of claims 40 - 49.

51. Lithography system according to claim. 50, comprising a vacuum chamber arranged outside of said load lock chamber, wherein the opening is a passage between the vacuum chamber of the lithography system and. the load lock system.

52. Method of using a load lock system, according to any one of the claims 40 - 49, the method comprising the steps of:

- moving the arm along the substantially vertical axis from the non-operational height to the operational height for coupling the arm to the arm transfer drive; and

- moving the arm along the substantially vertical axis from the operational height to the non-operational height for uncoupling the arm from the arm transfer drive; or vice versa.

53. Method according to claim 52, wherein the arm of the load lock transfer apparatus is a first arm, said load lock transfer apparatus further comprising a second arm movable relative to said the arm transfer drive along said substantially vertical axis for coupling said second arm to the arm transfer drive when the second arm is at the operational height and for uncoupling the second arm from the arm transfer drive when the second arm is at a non-operational height different from said operational height,

wherein during said moving of the first arm from or to the operational height the first arm and the second arm are moved in conjunction to move the second arm. to or from the operational height respectively.