LOAD PORT APPARATUS, CARRIER SYSTEM, AND CONTAINER CONVEYANCE METHOD

Title:

LOAD PORT APPARATUS, CARRIER SYSTEM, AND CONTAINER CONVEYANCE METHOD

Document Type and Number:

WIPO Patent Application WO/2012/160917

Kind Code:

A1

Abstract:

Provided is a load port apparatus with which the concentration of gas in a sealed container loaded on a carrier is prevented from being lowered. The load port apparatus carries a container (27) comprising a gas port to an outer conveyor unit (49) by using a ceiling carrier (59). The load port apparatus comprises a conveyance conveyor (47), a purge device (73), and a stocker controller (101). The conveyance conveyor (47) is extended to the outer conveyor unit (49). The purge device (73) is disposed close to the outer conveyor unit (49), and comprises an air supply nozzle (79) for supplying purge gas into the container (27) by being connected to the gas port, and a first elevating medium (87) which moves the air supply nozzle (79) toward or away from an air supply port (65). The stocker controller (101) controls purge gas supply into the container (27) by using the purge device (73), and stops the purge device (73) from supplying the purge gas into the container (27) in accordance with the arrival of the ceiling carrier (59) at the outer conveyor unit (49).

Inventors:

TOMINAGA TADAMASA (JP)

Application Number:

PCT/JP2012/060730

Publication Date:

November 29, 2012

Filing Date:

April 20, 2012

Export Citation:

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Assignee:

MURATA MACHINERY LTD (JP)
TOMINAGA TADAMASA (JP)

International Classes:

H01L21/677; B65G1/00; B65G1/04

Domestic Patent References:

WO2005101484A1

2005-10-27

Foreign References:

JP2006228808A	2006-08-31
JP2003060007A	2003-02-28
JPH06104328A	1994-04-15
JP2008159734A	2008-07-10
JP2004238191A	2004-08-26
JP2008105687A	2008-05-08
JP2010064806A	2010-03-25

Other References: