Title:
LOAD PORT AND EFEM
Document Type and Number:
WIPO Patent Application WO/2013/069716
Kind Code:
A1
Abstract:
[Problem] The purpose of the present invention is to provide a device capable of effectively increasing the number of wafers that can be conveyed inside a wafer conveyance chamber and capable of improving the wafer conveyance processing capacity if an EFEM is used, without leading to a marked increase in installation area. A load port is configured such that: a plurality of levels of loading tables are provided in the height direction; and wafers housed inside FOUP on top of each loading table can be inserted into and removed from inside wafer conveyance chambers, in a state wherein each loading table is arranged at a wafer insertion/removal position on the front surface of the wafer conveyance chambers at which the FOUP can be tightly affixed. The loading tables are configured so as to comprise a travel mechanism that moves wafers forward and back in the front/rear direction, between a FOUP receiving position at which the FOUP are handed over to a FOUP conveyance device and the wafer insertion/removal position.
Inventors:
OGURA GENGORO (JP)
HATANO TAKAICHI (JP)
HATANO TAKAICHI (JP)
Application Number:
PCT/JP2012/078920
Publication Date:
May 16, 2013
Filing Date:
November 08, 2012
Export Citation:
Assignee:
SINFONIA TECHNOLOGY CO LTD (JP)
International Classes:
H01L21/677
Foreign References:
| JP2008130634A | 2008-06-05 | |||
| JP2011040743A | 2011-02-24 | |||
| JPH11274267A | 1999-10-08 | |||
| JP2002540621A | 2002-11-26 | |||
| JP2001298069A | 2001-10-26 | |||
| JP2005150129A | 2005-06-09 |
Attorney, Agent or Firm:
SANO, Tadachika (JP)
Sadaya Sano (JP)
Sadaya Sano (JP)
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Claims: