Title:
LOAD SENSOR ELEMENT
Document Type and Number:
WIPO Patent Application WO/2023/181687
Kind Code:
A1
Abstract:
This load sensor element comprises a substrate, and an inorganic layer which has an accepting surface for accepting a load and which is provided so as to cover a portion of a top surface, which is one surface of the substrate. The load sensor element is provided with a thin-film resistor configured from a resistor having a resistance value that varies in accordance with the load accepted by the inorganic layer. The thin-film resistor includes a main body portion sandwiched between the substrate and the inorganic layer, and one end portion and an other end portion, which are two end portions placed on exposed portions of the substrate that are not covered by the inorganic layer. The load sensor element is provided with a first temperature compensation resistor which is independent of the thin-film resistor and which is disposed on an exposed portion 28 of the top surface, which is said one surface of the substrate. The load sensor element is provided with a second temperature compensation resistor which is disposed on a rear surface, being another surface of the substrate, and which exhibits the same behavior as the first temperature compensation resistor.
Inventors:
KARASAWA ATSUSHI (JP)
AOKI NATSUMI (JP)
TSUNO MASAYA (JP)
AOKI NATSUMI (JP)
TSUNO MASAYA (JP)
Application Number:
PCT/JP2023/004492
Publication Date:
September 28, 2023
Filing Date:
February 10, 2023
Export Citation:
Assignee:
KOA CORP (JP)
International Classes:
G01L1/22; G01L1/26
Foreign References:
| JPS6461628A | 1989-03-08 | |||
| JP2004205410A | 2004-07-22 | |||
| JP2007333408A | 2007-12-27 | |||
| CN105181217A | 2015-12-23 |
Attorney, Agent or Firm:
GOTOH & PARTNERS (JP)
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