Title:
LOAD SENSOR AND MULTI-AXIS ACTUATOR INTEGRATED WITH LOAD SENSOR
Document Type and Number:
WIPO Patent Application WO/2019/131700
Kind Code:
A1
Abstract:
Provided is a load sensor capable of accurately detecting the load of a pressing force onto an object of interest. The present invention is a load sensor used in a multi-axis actuator (10) having: a driving rod (12) that linearly moves in the axial direction in a manner accommodated in a housing (11); and a vacuum holding rod (22) that is disposed parallel to the driving rod (12), that linearly moves in the axial direction along with the driving rod (12), and a leading end portion (22a) of which is pressed on a chip when the chip is to be vacuum-held. A linking member (30) for linking the driving rod (12) and the vacuum holding rod (22) is provided. The linking member (30) has a first linking section (31) for linking the driving rod (12) and a second linking section (32) for linking the vacuum holding rod (22) in an integrated manner. The first linking section (31) has: a strain body portion (311) that is formed so as to be thinner than the second linking section (32) and that supports the driving rod (12); and strain gauges (41) to (44) attached to the strain body portion (311).
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Inventors:
LI KUI (JP)
EGUCHI KOTARO (JP)
EGUCHI KOTARO (JP)
Application Number:
PCT/JP2018/047711
Publication Date:
July 04, 2019
Filing Date:
December 26, 2018
Export Citation:
Assignee:
MINEBEA MITSUMI INC (JP)
International Classes:
G01L5/00; G01L1/22; H05K13/04
Foreign References:
| JP2010034121A | 2010-02-12 | |||
| JPH05191097A | 1993-07-30 | |||
| US20090033585A1 | 2009-02-05 | |||
| JP2014018072A | 2014-01-30 |
Other References:
See also references of EP 3734246A4
Attorney, Agent or Firm:
EINSEL Felix-Reinhard et al. (JP)
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