Title:
LOCAL HEATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2010/140683
Kind Code:
A1
Abstract:
Provided is a local heating device which, at the time of heating a substrate edge portion by means of a heating means, arranges the center position of the heating means and the center position of a substrate supporting member by shifting the positions one from the other by independently controlling the positions of the coordinates of the heating means and those of a substrate supporting member, sets the substrate supporting member at a position not physically interfering with substrate peripheral members, sets the heating means to the substrate edge portion, and heats the substrate edge portion. Thus, the positions in proximity to the substrate edge can be heated.
Inventors:
UEDA, Kazuhiko (())
Application Number:
JP2010/059545
Publication Date:
December 09, 2010
Filing Date:
June 04, 2010
Export Citation:
Assignee:
SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
International Classes:
F26B21/00; G02B5/20; B05C9/14
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (Daiwa Minamimorimachi Building, 2-6 Tenjinbashi 2-chome Kita, Kita-ku, Osaka-sh, Osaka 41, 〒5300041, JP)