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Patent Searching and Data


Title:
LOCAL VACUUM DEVICE, CHARGED PARTICLE DEVICE, METHOD FOR FORMING VACUUM REGION, AND CHARGED PARTICLE IRRADIATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/189366
Kind Code:
A1
Abstract:
A local vacuum device provided with: a vacuum formation member, which has a conduit that can be connected to an exhaust device, and which, through the conduit, exhausts gas in a space in contact with a surface of an object, thereby forming a vacuum region; a surface positioned at a position different from the object in a first direction along the surface of the object; and a position-changing device for changing the relative positions of the vacuum formation member and the object in both the first direction and a second direction. At least a portion of the gas in a space that is around the vacuum region and that has a higher pressure than the vacuum region is exhausted through the conduit of the vacuum formation member. The position-changing device controls first relative positions of the vacuum formation member and the object in the first direction and controls second relative positions of the vacuum formation member and the object in the second direction, and causes the vacuum formation member, which is facing either one of the object and the surface, to face the other one of the surface and the object.

Inventors:
FUNATSU, Takayuki (15-3 Konan 2-chome, Minato-k, Tokyo 90, 〒1086290, JP)
SUGAWARA, Ryu (15-3 Konan 2-chome, Minato-k, Tokyo 90, 〒1086290, JP)
Application Number:
JP2019/013208
Publication Date:
October 03, 2019
Filing Date:
March 27, 2019
Export Citation:
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Assignee:
NIKON CORPORATION (15-3, Konan 2-chome Minato-k, Tokyo 90, 〒1086290, JP)
International Classes:
H01J37/18; H01J37/20; H01J37/28
Foreign References:
JP2005235777A2005-09-02
JP2005147956A2005-06-09
Attorney, Agent or Firm:
EGAMI, Tatsuo (3rd Floor Oak Building Kyobashi, 16-10, Kyobashi 1-chome, Chuou-k, Tokyo 31, 〒1040031, JP)
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