Title:
LOCATOR PIN INTEGRATED WITH SENSOR FOR DETECTING SEMICONDUCTOR SUBSTRATE CARRIER
Document Type and Number:
WIPO Patent Application WO2003003418
Kind Code:
A3
Abstract:
A storage surface for a semiconductor substrate carrier has substrate carrier sensors that are integrated with locator pins. Each locator pin includes a pin body mounted on, and extending upwardly from, the surface. The pin body has a slot formed at an upper portion of the pin body. A paddle is mounted in the slot of the pin body and is adapted to be actuated in a downward direction when a substrate carrier is seated on the pin body. The pin body has an uppermost point, and when the paddle is unactuated, the paddle odes not extend above the uppermost point of the pin body.
Inventors:
ELLIOTT MARTIN R
HUDGENS JEFFREY C
HUDGENS JEFFREY C
Application Number:
PCT/US2002/020347
Publication Date:
June 05, 2003
Filing Date:
June 26, 2002
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
International Classes:
H01L21/00; (IPC1-7): H01L21/00
Foreign References:
| US5970621A | 1999-10-26 |
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