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Title:
LOW-CARBON OIL-FREE VACUUM AIR PUMP UNIT WITH HIGH PUMPING SPEED
Document Type and Number:
WIPO Patent Application WO/2019/052131
Kind Code:
A1
Abstract:
A low-carbon oil-free vacuum air pump unit with a high pumping speed comprises multiple vertical composite runoff molecular pumps, a cryogenic water vapor pump (19), and a chemisorption pump unit (14). A pumping speed comparable to that of a conventional diffusion pump is achieved. The vacuum air pump unit specifically comprises a vacuum chamber (11) separately connected to a rough pump unit (12), a vacuum housing (13), the chemisorption pump unit (14), a vent valve (15), and a vacuum gauge (16). A first vacuum valve (17) is disposed between the vacuum chamber (11) and the rough pump unit (12). A second vacuum valve (18) is disposed between the vacuum chamber (11) and the vacuum housing (13). The cryogenic water vapor pump (19) is disposed in an upper position inside the vacuum housing (13). A runoff pump unit (110) is disposed in a lower position inside the vacuum housing (13), and a vent port thereof is connected to a prior-stage pump (111) by a third vacuum valve (112). A fourth vacuum valve (113) is disposed between the vacuum chamber (11) and the chemisorption pump unit (14). The vacuum air pump unit reduces pumping energy consumption, shortens pumping time, and eliminates oil vapor pollution.

Inventors:
CHU, Xin (18C Hai Tang Ge, Bai Hua Yuan Futia, Shenzhen Guangdong 0, 518000, CN)
Application Number:
CN2018/078670
Publication Date:
March 21, 2019
Filing Date:
March 12, 2018
Export Citation:
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Assignee:
CHU, Xin (18C Hai Tang Ge, Bai Hua Yuan Futia, Shenzhen Guangdong 0, 518000, CN)
International Classes:
F04B37/14; F04B41/06
Foreign References:
CN107489605A2017-12-19
CN103758733A2014-04-30
CN106762713A2017-05-31
CN103290388A2013-09-11
CN101776063A2010-07-14
KR20120117657A2012-10-24
Attorney, Agent or Firm:
HENSEN INTELLECTUAL PROPERTY FIRM (10H Shangbu Building, No. 68 Nanyuan Road Futia, Shenzhen Guangdong 0, 518000, CN)
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