Title:
LOW-FRICTION PROTECTIVE LAYERS THAT REDUCE WEAR AND TEAR AND A METHOD FOR DEPOSITING SAME
Document Type and Number:
WIPO Patent Application WO2001068790
Kind Code:
A3
Abstract:
The invention relates to the field of materials technology and to protective layers, such as they are used on valve insets or deforming tools. The invention also relates to a method for depositing the same. The aim of the invention is to provide protective layers that are applied to different base materials in a relatively simple, essentially stressfree and adhesive manner. The aim of the invention is also to provide the depositing method therefor. According to the inventive method, the protective layers are deposited by means of solid matter sputtering of a graphite target and/or a target containing a graphite. Carbon monoxide and/or carbon dioxide, acting as a working gas or as a component of the working gas, is/are supplied to the target-related gas discharge and/or the partially identical layer-production-related gas discharge before and/or during the deposit. The aim of the invention is also obtained by protective layers that contain more than 95 atom % of carbon, are provided with a mass density ranging from 1.6 to 2.0 g/cm<3> and plastic hardness values of 5 to 30 GPa or E module values of 50 to 200 GPa.
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Inventors:
MUCHA ANDREAS (DE)
ROTHER BERND (DE)
ROTHER BERND (DE)
Application Number:
PCT/DE2001/001094
Publication Date:
December 06, 2001
Filing Date:
March 16, 2001
Export Citation:
Assignee:
MAT GMBH (DE)
MUCHA ANDREAS (DE)
ROTHER BERND (DE)
MUCHA ANDREAS (DE)
ROTHER BERND (DE)
International Classes:
C23C14/00; C23C14/06; (IPC1-7): C23C14/06; C23C14/00
Foreign References:
| EP0293662A2 | 1988-12-07 | |||
| US5476713A | 1995-12-19 | |||
| US5411797A | 1995-05-02 |
Other References:
DE MARTINO C ET AL: "Improvement of mechanical properties of a-C:H by silicon addition", DIAMOND AND RELATED MATERIALS, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 6, no. 5-7, 1 April 1997 (1997-04-01), pages 559 - 563, XP004081096, ISSN: 0925-9635
PATENT ABSTRACTS OF JAPAN vol. 012, no. 472 (C - 551) 9 December 1988 (1988-12-09)
SAVVIDES N ET AL: "HARDNESS AND ELASTIC MODULUS OF DIAMOND AND DIAMOND-LIKE CARBON FILMS", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, vol. 228, no. 1 / 2, 15 May 1993 (1993-05-15), pages 289 - 292, XP000381097, ISSN: 0040-6090
LACERDA R G ET AL: "HARD HYDROGENATED CARBON FILMS WITH LOW STRESS", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 73, no. 5, 3 August 1998 (1998-08-03), pages 617 - 619, XP000778936, ISSN: 0003-6951
SCHULTRICH B ET AL: "ELASTIC MODULUS AS A MEAASURE OF DIAMOND LIKENESS AND HARDNESS OF AMORPHOUS CARBON FILMS", DIAMOND AND RELATED MATERIALS, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 5, no. 9, 1 July 1996 (1996-07-01), pages 914 - 918, XP000685026, ISSN: 0925-9635
NOBILI L ET AL: "A-C(:H) AND A-CNX(:H) FILMS DEPOSITED BY MAGNETRON SPUTTERING AND PACVD", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, vol. 317, no. 1/2, 1 April 1998 (1998-04-01), pages 359 - 362, XP000667839, ISSN: 0040-6090
PATENT ABSTRACTS OF JAPAN vol. 012, no. 472 (C - 551) 9 December 1988 (1988-12-09)
SAVVIDES N ET AL: "HARDNESS AND ELASTIC MODULUS OF DIAMOND AND DIAMOND-LIKE CARBON FILMS", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, vol. 228, no. 1 / 2, 15 May 1993 (1993-05-15), pages 289 - 292, XP000381097, ISSN: 0040-6090
LACERDA R G ET AL: "HARD HYDROGENATED CARBON FILMS WITH LOW STRESS", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 73, no. 5, 3 August 1998 (1998-08-03), pages 617 - 619, XP000778936, ISSN: 0003-6951
SCHULTRICH B ET AL: "ELASTIC MODULUS AS A MEAASURE OF DIAMOND LIKENESS AND HARDNESS OF AMORPHOUS CARBON FILMS", DIAMOND AND RELATED MATERIALS, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 5, no. 9, 1 July 1996 (1996-07-01), pages 914 - 918, XP000685026, ISSN: 0925-9635
NOBILI L ET AL: "A-C(:H) AND A-CNX(:H) FILMS DEPOSITED BY MAGNETRON SPUTTERING AND PACVD", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, vol. 317, no. 1/2, 1 April 1998 (1998-04-01), pages 359 - 362, XP000667839, ISSN: 0040-6090
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