Title:
LOW-K DIELECTRIC MATERIAL
Document Type and Number:
WIPO Patent Application WO2004090936
Kind Code:
A3
Abstract:
The present invention relates to thin films suitable as dielectrics in integrated circuits and for other similar applications and to methods for the production thereof. In particular, the invention concerns thin films comprising at least partially cross-linked siloxane structures obtainable by hydrolysis of one or more silicon compounds of the general formula R1-R2-Si-(X1)3, wherein X1 is a leaving group, R2 is a cycloalkyl having from 3 to 16 carbon atoms, an aryl having from 5 to 18 carbon atoms or a polycyclic alkyl group having from 7 to 16 carbon atoms, and R1 is a substituent of R2 selected from alkyl groups having from 1 to 4 carbon atoms, alkenyl groups having from 2 to 5 carbon atoms, alkynyl groups having from 2 to 5 carbon atoms, and aromatic groups having 5 or 6 carbon atoms, each of said groups being optionally substituted, and Cl and F.
Inventors:
RANTALA JUHA (FI)
Application Number:
PCT/FI2004/000224
Publication Date:
December 09, 2004
Filing Date:
April 13, 2004
Export Citation:
Assignee:
SILECS OY (FI)
RANTALA JUHA (FI)
PAULASAARI JYRI (FI)
PIETIKAEINEN JARKKO (FI)
TOERMAENEN TEEMU (FI)
HACKER NIGEL (FI)
VISWANATHAN NUNGAVARAM (US)
RANTALA JUHA (FI)
PAULASAARI JYRI (FI)
PIETIKAEINEN JARKKO (FI)
TOERMAENEN TEEMU (FI)
HACKER NIGEL (FI)
VISWANATHAN NUNGAVARAM (US)
International Classes:
C08G77/04; C08G77/20; H01B3/46; H01L; (IPC1-7): C08G77/20; C08G77/04; H01B3/46
Foreign References:
| US6348240B1 | 2002-02-19 |
Other References:
DATABASE CAPLUS [online] VAKS E.A. ET AL.: "Radiation-chemical synthesis of polyfluoroaromatic derivatives of silicon affected by accelerated electrons", XP002980946, accession no. STN Database accession no. 1975:497451
DATABASE CAPLUS [online] NOVIKOV S.S. ET AL.: "Silicon-containing polycyclic hydrocarbons. I. Study of the alkylation of phenylchlorosilanes by 1-bromoadamantane", XP002980947, accession no. STN Database accession no. 1979:420591
BENKESER R.A. ET AL.: "A new method of forming the carbon-silicon bond. Reductive silylation of carbonyl compounds", JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, vol. 91, no. 6, 12 March 1969 (1969-03-12), pages 1556 - 1557, XP002980948
HAYASHI T.: "Asymmetric Hydrosilylation of Olefins Catalyzed by MOP-Palladium Complexes", ACTA CHEMICA SCANDINAVICA, vol. 50, 1996, pages 259 - 266, XP002124317
DATABASE CAPLUS [online] NOVIKOV S.S. ET AL.: "Silicon-containing polycyclic hydrocarbons. I. Study of the alkylation of phenylchlorosilanes by 1-bromoadamantane", XP002980947, accession no. STN Database accession no. 1979:420591
BENKESER R.A. ET AL.: "A new method of forming the carbon-silicon bond. Reductive silylation of carbonyl compounds", JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, vol. 91, no. 6, 12 March 1969 (1969-03-12), pages 1556 - 1557, XP002980948
HAYASHI T.: "Asymmetric Hydrosilylation of Olefins Catalyzed by MOP-Palladium Complexes", ACTA CHEMICA SCANDINAVICA, vol. 50, 1996, pages 259 - 266, XP002124317
Download PDF: