Title:
LOW-LOSS OPTICAL DEVICE STRUCTURE
Document Type and Number:
WIPO Patent Application WO2008058099
Kind Code:
A9
Abstract:
A method of fabrication and a structure for a low-loss optical device. The optical device structure includes a waveguide (18) that is formed within a device layer (2) of an SOI substrate (10). A cladding region (24) is formed beneath the waveguide (18) and a buried oxyde (BOX) layer (14) of the SOI substrate (10). The cladding region (24) may comprise an air cavity or a cavity that is filled or at least partially filled with a dielectric material. Because the cladding region (24) is formed in the bottom side, it supplements the BOX layer (14) cladding. Consequently, a thinner BOX layer (14) may be used for both electronic and optical devices, which facilitates optoelectronic IC processing and design.
More Like This:
| JP4194072 | Optical device |
| WO/2001/096913 | LIGHT MODULATION IN WHISPERING-GALLERY-MODE RESONATORS |
| WO/2020/075530 | OPTICAL MODULE |
Inventors:
KEYSER THOMAS (US)
HUGHES GRENVILLE (US)
YUE JERRY (US)
HUGHES GRENVILLE (US)
YUE JERRY (US)
Application Number:
PCT/US2007/083697
Publication Date:
October 23, 2008
Filing Date:
November 06, 2007
Export Citation:
Assignee:
HONEYWELL INT INC (US)
KEYSER THOMAS (US)
HUGHES GRENVILLE (US)
YUE JERRY (US)
KEYSER THOMAS (US)
HUGHES GRENVILLE (US)
YUE JERRY (US)
International Classes:
G02B6/12; G02B6/136
Download PDF: