Title:
LTPS TFT PIXEL UNIT AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2016/106923
Kind Code:
A1
Abstract:
An LTPS TFT pixel unit and a manufacturing method therefor. The method comprises the steps of: providing a substrate (11), and forming a buffer layer (12) on the substrate (11); and forming a semiconductor pattern layer (13) and a first insulation layer (142) on the buffer layer (12), wherein the semiconductor pattern layer (13) and the first insulation layer (142) are arranged on the same layer, and the semiconductor pattern layer (13) has the same height as that of the first insulation layer (142). In this way, the lateral effect of an LTPS TFT pixel unit can be reduced, and the electrical property thereof can be improved.
Inventors:
YANG ZUYOU (CN)
Application Number:
PCT/CN2015/071708
Publication Date:
July 07, 2016
Filing Date:
January 28, 2015
Export Citation:
Assignee:
SHENZHEN CHINA STAR OPTOELECT (CN)
International Classes:
H01L21/77; G02F1/1333; H01L21/336; H01L27/12
Foreign References:
| CN103943630A | 2014-07-23 | |||
| CN103972050A | 2014-08-06 | |||
| CN1554969A | 2004-12-15 | |||
| CN103268855A | 2013-08-28 | |||
| CN203871327U | 2014-10-08 | |||
| CN103018974A | 2013-04-03 | |||
| US20080265254A1 | 2008-10-30 |
Attorney, Agent or Firm:
CHINA WISPRO INTELLECTUAL PROPERTY LLP. (CN)
深圳市威世博知识产权代理事务所（普通合伙） (CN)
深圳市威世博知识产权代理事务所（普通合伙） (CN)
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