Title:
MACHINING APPARATUS CORRECTION METHOD AND MACHINING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2017/130412
Kind Code:
A1
Abstract:
The machining apparatus correction method according to the present invention is applied as a correction method for a machining apparatus provided with a position changing unit for changing the relative positions of an object to be machined and a tool, and a control unit for controlling the position changing unit. The machining apparatus correction method forms a plurality of machining marks on the object to be machined before the object is machined, and then corrects a control value output to the position changing unit, on the basis of the difference between the relative positional relationship between the plurality of machining marks and the relative positional relationship between machining shapes specified by the control unit.
Inventors:
YAMADA TOMOAKI (JP)
Application Number:
PCT/JP2016/052825
Publication Date:
August 03, 2017
Filing Date:
January 29, 2016
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G05B19/404; B23Q15/00
Domestic Patent References:
| WO2014068709A1 | 2014-05-08 |
Foreign References:
| JPH079303A | 1995-01-13 | |||
| JP2004009293A | 2004-01-15 | |||
| JP2009223440A | 2009-10-01 | |||
| JP2008073782A | 2008-04-03 |
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
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