Title:
MACHINING JIG AND METHOD FOR MANUFACTURING SPUTTERING TARGET MEMBER
Document Type and Number:
WIPO Patent Application WO/2016/157648
Kind Code:
A1
Abstract:
The present invention addresses the problem of minimizing the occurrence of scratches and cracks on the outer peripheral surface of a cylindrical ceramic. In order to solve this problem, a machining jig (31, 131) according to an aspect of the embodiment is provided with rotating bodies (34, 134). The rotating bodies (34, 134) rotate by following motion in response to rotation of a cylindrical ceramic (10). The length of the rotating bodies (34, 134) in the rotation direction is 15 mm or greater, and the material making up at least the outer peripheral portion of the rotating bodies (34, 134) is a resin having a Rockwell hardness of 80-125, inclusive, or rubber having a rubber hardness of 80-95, inclusive.
Inventors:
TERAMURA KYOSUKE (JP)
SHIBAO MASANORI (JP)
TAKEUCHI TOMOYA (JP)
SHIBAO MASANORI (JP)
TAKEUCHI TOMOYA (JP)
Application Number:
PCT/JP2015/085687
Publication Date:
October 06, 2016
Filing Date:
December 21, 2015
Export Citation:
Assignee:
MITSUI MINING & SMELTING CO (JP)
International Classes:
C23C14/34; B24B41/06; C04B35/00
Foreign References:
| JP2014148026A | 2014-08-21 | |||
| JP2008023624A | 2008-02-07 | |||
| JPS58154029U | 1983-10-14 | |||
| JP2005281862A | 2005-10-13 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
Patent business corporation Sakai international patent firm (JP)
Patent business corporation Sakai international patent firm (JP)
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