Title:
MAGNESIUM BIS(DIALKYLAMIDE) COMPOUND, AND PROCESS FOR PRODUCTION OF MAGNESIUM-CONTAINING THIN FILM USING THE MAGNESIUM COMPOUND
Document Type and Number:
WIPO Patent Application WO/2012/018086
Kind Code:
A1
Abstract:
The present invention relates to: a magnesium bis(dialkylamide) compound represented by general formula (1) (wherein R1 represents an isopropyl group, or a branched alkyl group having 4-6 carbon atoms; and R2 represents a linear or branched alkyl group having 1-5 carbon atoms; wherein a case in which each of R1 and R2 represents an isopropyl group, a case in which each of R1 and R2 represents an isobutyl group and a case in which R1 represents an isopropyl group and R2 represents a methyl group are excluded); and a process for producing a magnesium-containing thin film using the magnesium compound.
Inventors:
FUJIMURA OSAMU (JP)
KANATO HIROKI (JP)
KANATO HIROKI (JP)
Application Number:
PCT/JP2011/067880
Publication Date:
February 09, 2012
Filing Date:
August 04, 2011
Export Citation:
Assignee:
UBE INDUSTRIES (JP)
FUJIMURA OSAMU (JP)
KANATO HIROKI (JP)
FUJIMURA OSAMU (JP)
KANATO HIROKI (JP)
International Classes:
C07F3/02; C23C16/40
Domestic Patent References:
| WO2008039960A1 | 2008-04-03 |
Foreign References:
| DE10061317C1 | 2002-04-04 | |||
| JPS63238086A | 1988-10-04 | |||
| US5892083A | 1999-04-06 | |||
| JP2005126334A | 2005-05-19 | |||
| JP2009536267A | 2009-10-08 |
Other References:
E.C.ASHBY ET AL.: "Reactions of Magnesium Hydrides. 3.Stereoselective Reduction of Cyclic and Bicyclic Ketones by Dialkylaminomagnesium Hydrides", JOURNAL OF ORGANIC CHEMISTRY, vol. 43, no. 8, 1978, pages 1564 - 1566
C.J.ROHBOGNER ET AL., EUROPEAN JOURNAL OF ORGANIC CHEMISTRY, no. 11, 2009, pages 1781 - 1795
C.J.ROHBOGNER ET AL., EUROPEAN JOURNAL OF ORGANIC CHEMISTRY, no. 11, 2009, pages 1781 - 1795
Attorney, Agent or Firm:
ITO, Katsuhiro et al. (JP)
Katsuhiro Ito (JP)
Katsuhiro Ito (JP)
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Claims: