Title:
MAGNET ASSEMBLY OF MAGNETRON SPUTTERING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/160273
Kind Code:
A1
Abstract:
According to one embodiment, a magnet assembly of a magnetron sputtering device can comprise: a yoke; an electromagnet arranged on the yoke and having magnetic poles differing from each other with respect to a direction orthogonal to the yoke; and a permanent magnet arranged on the yoke so as to be spaced from the electromagnet, having magnetic poles formed to be opposite those of the electromagnet, and encompassing at least a portion of the electromagnet.
Inventors:
KIM JUNG GUN (KR)
SO BYUNG HO (KR)
KO MU SEOK (KR)
BYEON DONG BEOM (KR)
SO BYUNG HO (KR)
KO MU SEOK (KR)
BYEON DONG BEOM (KR)
Application Number:
PCT/KR2019/001559
Publication Date:
August 22, 2019
Filing Date:
February 08, 2019
Export Citation:
Assignee:
ULVAC KOREA CO LTD (KR)
International Classes:
H01J37/34; C23C14/35; H01F7/02; H01F7/06
Foreign References:
| JP2013524016A | 2013-06-17 | |||
| KR20020019305A | 2002-03-12 | |||
| KR20050018716A | 2005-02-24 | |||
| JP2013104073A | 2013-05-30 | |||
| KR20140003570A | 2014-01-09 |
Attorney, Agent or Firm:
MUHANN PATENT & LAW FIRM (KR)
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