Title:
MAGNETIC FIELD MEASUREMENT DEVICE, MAGNETIC FIELD MEASUREMENT METHOD, AND MAGNETIC FIELD MEASUREMENT PROGRAM
Document Type and Number:
WIPO Patent Application WO/2020/040168
Kind Code:
A1
Abstract:
Provided is a magnetic field measurement device provided with: a magnetic sensor array in which a plurality of magnetic sensor cells capable of detecting a magnetic field in three axis directions are arranged in three dimensions, the magnetic sensor cells having a plurality of magnetic sensors each having a magnetoresistive element and a magnetic convergence plate disposed at both ends of the magnetoresistive element; a magnetic field acquisition unit for acquiring measurement data measured by the magnetic sensor array; and a signal space separation unit for performing signal separation of the spatial distribution of a magnetic field indicated by the measurement data, using as a base vector the signal vector outputted by each of the plurality of magnetic sensors when a magnetic field having an orthonormal-function spatial distribution is detected by the magnetic sensor array.
Inventors:
NAKAMURA TAKENOBU (JP)
OKATAKE SHIGEKI (JP)
MORIYASU YOSHITAKA (JP)
KATAOKA MAKOTO (JP)
OKATAKE SHIGEKI (JP)
MORIYASU YOSHITAKA (JP)
KATAOKA MAKOTO (JP)
Application Number:
PCT/JP2019/032548
Publication Date:
February 27, 2020
Filing Date:
August 21, 2019
Export Citation:
Assignee:
ASAHI KASEI MICRODEVICES CORP (JP)
International Classes:
G01R33/09; A61B5/05; G01R33/02; G01R35/00; H01L43/08
Domestic Patent References:
| WO2003046587A1 | 2003-06-05 |
Foreign References:
| JP2018007821A | 2018-01-18 | |||
| JP2017133993A | 2017-08-03 | |||
| JP2017133889A | 2017-08-03 | |||
| JP2006047080A | 2006-02-16 | |||
| JP5014783B2 | 2012-08-29 | |||
| JP2004337478A | 2004-12-02 | |||
| JP2017062122A | 2017-03-30 | |||
| JP2011220977A | 2011-11-04 | |||
| US20120105058A1 | 2012-05-03 | |||
| US20120041297A1 | 2012-02-16 |
Attorney, Agent or Firm:
RYUKA IP LAW FIRM (JP)
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