Title:
MAGNETIC LINEAR SENSOR
Document Type and Number:
WIPO Patent Application WO/2020/202864
Kind Code:
A1
Abstract:
A magnetic response part (12) in which a scale (1) of a magnetic linear sensor (100) is provided is configured so that a change in a magnetic effect on a magnetic detection head (2) appears so as to alternately repeat for each first pitch (C1) in a displacement detection direction. The magnetic detection head (2) is provided on one side of the scale (1), in a first direction perpendicular to the displacement detection direction. The magnetic detection head (2) is provided with a base substrate part (22) and a plurality of signal output parts (6). The signal output parts (6) are disposed on an insulating plate, and are arranged in the displacement detection direction at a second pitch (C2) which is based on the first pitch (C1). A first electroconductive pattern (3) and a second electroconductive pattern provided to each of the signal output parts (6) are formed so that coil elements are arranged in rows in a narrow region in a second direction orthogonal to both the displacement detection direction and the first direction. The first electroconductive pattern (3) and the second electroconductive pattern have a unicursal shape.
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Inventors:
SHIMIZU TETSUYA (JP)
KIDO RYOHEI (JP)
KIDO RYOHEI (JP)
Application Number:
PCT/JP2020/006532
Publication Date:
October 08, 2020
Filing Date:
February 19, 2020
Export Citation:
Assignee:
MURATA MACHINERY LTD (JP)
International Classes:
G01D5/245
Foreign References:
| JPH11223505A | 1999-08-17 | |||
| JP2006017533A | 2006-01-19 | |||
| JP2005156348A | 2005-06-16 | |||
| JP2002148002A | 2002-05-22 | |||
| JP2008286667A | 2008-11-27 | |||
| US20090174396A1 | 2009-07-09 | |||
| JP2002090176A | 2002-03-27 |
Other References:
See also references of EP 3951325A4
Attorney, Agent or Firm:
KATSURAGAWA, Naoki (JP)
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