Title:
MAGNETIC SENSOR AND ELECTRIC CURRENT SENSOR PROVIDED WITH MAGNETIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2016/021260
Kind Code:
A1
Abstract:
Provided are: a magnetic sensor provided with a coil and a magnetic measurement element, the magnetic sensor being capable of measuring, with high precision, a magnetic field induced by an electric current flowing through the coil; and an electric current sensor provided with the magnetic sensor; the magnetic sensor being provided with a spiral first coil and second coil and the magnetic measurement element, and measuring in the magnetic measurement element an induced magnetic field based on the electric current flowing through the first coil and the second coil, the magnetic measurement element being superposed on the first coil and the second coil in plan view of the magnetic sensor, a plurality of partial coil wires forming a portion of the first coil and a plurality of partial coil wires forming a portion of the second coil being substantially parallel to each other and at an equal pitch in at least an overlapping region, a magnetic field sensitivity axis passing through the center of gravity of a magnetic detection part of the magnetic measurement element being positioned in a magnetic field sensitivity plane which is a plane parallel to a first plane on which the first coil is positioned, the distance of the magnetic field sensitivity plane from the first plane being set to a first value d1 (units: µm), and the first value d1 and the pitch value p (units: µm) of a plurality of first wire parts satisfying the relationship represented by expression (1). (1): d1/p ≤ 1.5
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Inventors:
HATAYA HIDENORI (JP)
Application Number:
PCT/JP2015/063834
Publication Date:
February 11, 2016
Filing Date:
May 13, 2015
Export Citation:
Assignee:
ALPS GREEN DEVICES CO LTD (JP)
International Classes:
G01R15/20; G01R33/07; G01R33/09; H01L43/08
Foreign References:
| JP2001194181A | 2001-07-19 | |||
| JPH07325137A | 1995-12-12 | |||
| JPH08264857A | 1996-10-11 | |||
| JP2011196798A | 2011-10-06 | |||
| JP2013172040A | 2013-09-02 | |||
| JP2007064851A | 2007-03-15 |
Attorney, Agent or Firm:
OKUBO KATSUYUKI (JP)
Katsuyuki Okubo (JP)
Katsuyuki Okubo (JP)
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