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Title:
MAGNETIC SENSOR AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/087884
Kind Code:
A1
Abstract:
A magnetic sensor and a manufacturing method therefor. The magnetic sensor comprises: a chip provided with a bottom electrode and a device group disposed on the chip, the device group comprising a first magnetic tunnel junction device electrically connected to the bottom electrode; a wiring layer disposed above the first magnetic tunnel junction device; a second magnetic tunnel junction device and a second mask layer disposed at the upper surface of the wiring layer and stacked in sequence, magnetic moment directions of reference layers in the first magnetic tunnel junction device and the second magnetic tunnel junction device being parallel and opposite; a top electrode disposed at the upper surface of the second mask layer; and a signal leading-out part connected to the wiring layer. The first magnetic tunnel junction device and the second magnetic tunnel junction device are distributed in a vertical direction, which can reduce the area of a magnetic sensor, and the magnetic moment directions of the reference layers in the two magnetic tunnel junction devices are parallel and opposite, so that the resistances of the two devices vary inversely in the same magnetic field; that is, the first magnetic tunnel junction device and the second magnetic tunnel junction device are formed on the same chip, so that a Wheatstone half-bridge can be formed without requiring a special process is not needed, and the method is very simple.

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Inventors:
LIU ENLONG (CN)
HE SHIKUN (CN)
Application Number:
PCT/CN2022/119594
Publication Date:
May 25, 2023
Filing Date:
September 19, 2022
Export Citation:
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Assignee:
ZHEJIANG HIKSTOR TECH CO LTD (CN)
International Classes:
H01L43/08
Foreign References:
CN104134748A2014-11-05
US20180114898A12018-04-26
JP2018133474A2018-08-23
CN112863566A2021-05-28
CN110112286A2019-08-09
CN105161613A2015-12-16
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW CO., LTD. (CN)
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