Title:
MAGNETIC SENSOR AND MAGNETIC SENSOR MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/110407
Kind Code:
A1
Abstract:
This magnetic sensor 1 comprises: a nonmagnetic substrate 10; a sensing element 31 that is laminated on the substrate 10, is configured from a soft magnetic material, has a long direction and short direction, has uniaxial magnetic anisotropy in a direction crossing the long direction, and senses a magnetic field using a magnetic impedance effect; and a pair of thin-film magnets 20a, 20b that are laminated on the substrate 10, are disposed so as to oppose each other across the long direction with the sensing element 31 interposed therebetween, and apply a magnetic field in the long direction of the sensing element 31.
Inventors:
ENDO DAIZO (JP)
SHINO TATSUNORI (JP)
OHASHI HARUHISA (JP)
SHINO TATSUNORI (JP)
OHASHI HARUHISA (JP)
Application Number:
PCT/JP2019/035034
Publication Date:
June 04, 2020
Filing Date:
September 05, 2019
Export Citation:
Assignee:
SHOWA DENKO KK (JP)
International Classes:
G01R33/02; H01L43/00
Domestic Patent References:
| WO2007129705A1 | 2007-11-15 |
Foreign References:
| JP2008249406A | 2008-10-16 | |||
| JP2015010902A | 2015-01-19 | |||
| JP2017053655A | 2017-03-16 | |||
| JP2002176210A | 2002-06-21 |
Attorney, Agent or Firm:
FURUBE, Jiro et al. (JP)
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