MAGNETIC SENSOR AND METHOD FOR DETECTING MAGNETISM THEREOF

Title:

MAGNETIC SENSOR AND METHOD FOR DETECTING MAGNETISM THEREOF

Document Type and Number:

WIPO Patent Application WO/2014/156108

Kind Code:

A1

Abstract:

The present invention relates to a magnetic sensor capable of sensing a state in which at least a perpendicular magnetic field and a parallel magnetic field are mixed on a substrate and the magnetic field components can be separated, and to a method for detecting magnetism thereof. One aspect of the magnetic sensor is a magnetic sensor for detecting magnetism along three orthogonal axes, comprising: a magnetic detection unit (50a or 50b) having a magneto-sensitive material for sensing a magnetic field component in a first direction, and a magnetic field direction conversion unit (60a, 60b) for converting, to the first direction, the magnetic field component in a second direction orthogonal to the first direction and a magnetic field component in a third direction orthogonal to both the first and second directions.

Inventors:

YAMASHITA MASAYA (JP)
YAMAGATA YO (JP)
TANAKA KEN (JP)
MIKOSHIBA NORIHIKO (JP)

Application Number:

PCT/JP2014/001676

Publication Date:

October 02, 2014

Filing Date:

March 24, 2014

Export Citation:

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Assignee:

ASAHI KASEI MICRODEVICES CORP (JP)

International Classes:

G01R33/09; H01L43/08

Domestic Patent References:

WO2013118498A1	2013-08-15
WO2011068146A1	2011-06-09

Foreign References:

JP2013002856A	2013-01-07
JP2002071381A	2002-03-08
JP2003194574A	2003-07-09
JP2009077385A	2009-04-09
JPH11274598A	1999-10-08
JP2006003116A	2006-01-05
JP2006010461A	2006-01-12
JPH07169026A	1995-07-04
JP2002071381A	2002-03-08
JP2004006752A	2004-01-08
JP2003282996A	2003-10-03

Other References: