Title:
MAGNETIC SENSOR AND MAGNETIC SENSOR SYSTEM
Document Type and Number:
WIPO Patent Application WO/2020/170746
Kind Code:
A1
Abstract:
A magnetic sensor 1 comprises: a thin film magnet 20 that is formed from a conductive material; a dielectric layer 104 that is formed from a dielectric and is layered on the thin film magnet 20; and a sensing part 30 which has a sensing element 31 that has a longitudinal direction and a lateral direction, has uniaxial magnetic anisotropy in a direction intersecting the longitudinal direction, and senses a magnetic field by the magnetoimpedance effect, the sensing element 31 comprising a plurality of soft magnetic layers 105 layered on the dielectric layer 104 and a highly conductive layer 106 that is layered between the plurality of soft magnetic layers 105 and has a higher conductivity compared to the soft magnetic layers 105.
Inventors:
SHINO TATSUNORI (JP)
ENDO DAIZO (JP)
ENDO DAIZO (JP)
Application Number:
PCT/JP2020/003321
Publication Date:
August 27, 2020
Filing Date:
January 30, 2020
Export Citation:
Assignee:
SHOWA DENKO KK (JP)
International Classes:
H01L43/00; G01R33/02
Domestic Patent References:
| WO2018230116A1 | 2018-12-20 | |||
| WO2008088021A1 | 2008-07-24 | |||
| WO2003009403A1 | 2003-01-30 |
Foreign References:
| JPH08330644A | 1996-12-13 | |||
| JP2000193728A | 2000-07-14 | |||
| JP2000019034A | 2000-01-21 | |||
| US5491604A | 1996-02-13 |
Attorney, Agent or Firm:
FURUBE, Jiro et al. (JP)
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